In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular ...In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.展开更多
In situ infrared absorption spectroscopy has been measured for a hot filament diamond growth process. Absorption of CH4 and C2H2 species at 3050 cm-1 and 730 cm-1 were detected respectively. The absorption intensity o...In situ infrared absorption spectroscopy has been measured for a hot filament diamond growth process. Absorption of CH4 and C2H2 species at 3050 cm-1 and 730 cm-1 were detected respectively. The absorption intensity of CH4 decreases while that of C2H2 increases as filament temperature is raised. The correlation between infrared absorption intensity and diamond growth rate or diamond film quality was found. High C2H2 or low CH4 concentration in the reaction region leads to high quality diamond film growth and high growth rate.展开更多
Diamond nucleation and growth on a LaAlO_(3) single crystal substrate,whose lattice mismatch with diamond is only 7.2%at high temperature,were investigated for the first time.As an insulating substrate,a nucleation de...Diamond nucleation and growth on a LaAlO_(3) single crystal substrate,whose lattice mismatch with diamond is only 7.2%at high temperature,were investigated for the first time.As an insulating substrate,a nucleation density of more than 108 cm_(-2) was achieved on ultrasonically cleaned wafers.A free-standing diamond film was obtained for 65 h growth and characterized by scanning electron microscopy,Raman and x-ray photoelectron spectroscopy.The results show that LaAIO3 single crystal is a good candidate substrate for diamond film growth.展开更多
文摘In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.
基金Supported by the High Technology Research and Development Programme of China.
文摘In situ infrared absorption spectroscopy has been measured for a hot filament diamond growth process. Absorption of CH4 and C2H2 species at 3050 cm-1 and 730 cm-1 were detected respectively. The absorption intensity of CH4 decreases while that of C2H2 increases as filament temperature is raised. The correlation between infrared absorption intensity and diamond growth rate or diamond film quality was found. High C2H2 or low CH4 concentration in the reaction region leads to high quality diamond film growth and high growth rate.
基金Supported by the High Technology Research and Development Program of China under Grant No.863-715-002-003.
文摘Diamond nucleation and growth on a LaAlO_(3) single crystal substrate,whose lattice mismatch with diamond is only 7.2%at high temperature,were investigated for the first time.As an insulating substrate,a nucleation density of more than 108 cm_(-2) was achieved on ultrasonically cleaned wafers.A free-standing diamond film was obtained for 65 h growth and characterized by scanning electron microscopy,Raman and x-ray photoelectron spectroscopy.The results show that LaAIO3 single crystal is a good candidate substrate for diamond film growth.
