We compared the photoluminescence(PL)properties of Al In As Sb digital alloy samples with different periods grown on Ga Sb(001)substrates by molecular beam epitaxy.Temperature-dependent S-shape behavior is observed an...We compared the photoluminescence(PL)properties of Al In As Sb digital alloy samples with different periods grown on Ga Sb(001)substrates by molecular beam epitaxy.Temperature-dependent S-shape behavior is observed and explained using a thermally activated redistribution model within a Gaussian distribution of localized states.There are two different mechanisms for the origin of the PL intensity quenching for the Al In As Sb digital alloy.The high-temperature activation energy E_(1)is positively correlated with the interface thickness,whereas the low-temperature activation energy E_(2)is negatively correlated with the interface thickness.A quantitative high-angle annular dark-field scanning transmission electron microscopy(HAADF-STEM)study shows that the interface quality improves as the interface thickness increases.Our results confirm that E_(1)comes from carrier trapping at a state in the In Sb interface layer,while E_(2)originates from the exciton binding energy due to the roughness of the Al As interface layer.展开更多
High performance short-wavelength infrared PBn photodetectors based on InAs/GaSb/AlSb superlattices on GaSb substrate have been demonstrated.At 300 K,the device exhibits a 50%cut-off wavelength of~2.1μm as predicted ...High performance short-wavelength infrared PBn photodetectors based on InAs/GaSb/AlSb superlattices on GaSb substrate have been demonstrated.At 300 K,the device exhibits a 50%cut-off wavelength of~2.1μm as predicted from the band structure calculation;the device responsivity peaks at 0.85 A/W,corresponding to a quantum efficiency(QE)of 56%for 2.0μm-thick absorption region.The dark current density of 1.03×10^(-3)A/cm^(2)is obtained under 50 mV applied bias.The device exhibits a saturated dark current shot noise limited specific detectivity(D*)of 3.29×1010cm·Hz^(1/2)/W(at a peak responsivity of 2.0μm)under-50 mV applied bias.展开更多
In this paper, high material quality Al_(0.4) In_(0.6) AsSb quaternary alloy on GaSb substrates is demonstrated. The quality of these epilayers is assessed using a high-resolution x-ray diffraction, Fourier transform ...In this paper, high material quality Al_(0.4) In_(0.6) AsSb quaternary alloy on GaSb substrates is demonstrated. The quality of these epilayers is assessed using a high-resolution x-ray diffraction, Fourier transform infrared(FTIR) spectrometer,and atomic force microscope(AFM). The x-ray diffraction exhibits high order satellite peaks with a measured period of 31.06 ?(theoretical value is 30.48 ?), the mismatch between the GaSb substrate and AlInAsSb achieves-162 arcsec,and the root-mean square(RMS) roughness for typical material growths has achieved around 1.6 ? over an area of 10 μm×10 μm. At room temperature, the photoluminescence(PL) spectrum shows a cutoff wavelength of 1.617 μm.展开更多
The eight-band κ·p model is used to establish the energy band structure model of the type-II InAs/GaSb superlattice detectors with a cut-off wavelength of 10.5μm,and the best composition of M-structure in this ...The eight-band κ·p model is used to establish the energy band structure model of the type-II InAs/GaSb superlattice detectors with a cut-off wavelength of 10.5μm,and the best composition of M-structure in this type of device is calculated theoretically.In addition,we have also experimented on the devices designed with the best performance to investigate the effect of the active region p-type doping temperature on the quantum efficiency of the device.The results show that the modest active region doping temperature(Be:760℃)can improve the quantum efficiency of the device with the best performance,while excessive doping(Be:>760℃)is not conducive to improving the photo response.With the best designed structure and an appropriate doping concentration,a maximum quantum efficiency of 45% is achieved with a resistance-area product of 688?·cm^2,corresponding to a maximum detectivity of 7.35×10^11cm·Hz^1/2/W.展开更多
The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solu...The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solution(citric acid,phosphoric acid,hydrogen peroxide,deionized water),the best solution ratio is obtained.After comparing different passivation materials such as sulfide+SiO_(2),Al_(2)O_(3),Si_(3)N_(4) and SU8,it is found that SU8 passivation can reduce the dark current of the device to a greater degree.Combining this wet etching and SU8 passivation,the of VLWIR detector with a mesa diameter of 500μm is about 3.6Ω·cm^(2) at 77 K.展开更多
By optimizing theⅤ/Ⅲbeam-equivalent pressure ratio,a high-quality InAs/GaSb type-Ⅱsuperlattice material for the long-wavelength infrared(LWIR)range is achieved by molecular beam epitaxy(MBE).High-resolution x-ray d...By optimizing theⅤ/Ⅲbeam-equivalent pressure ratio,a high-quality InAs/GaSb type-Ⅱsuperlattice material for the long-wavelength infrared(LWIR)range is achieved by molecular beam epitaxy(MBE).High-resolution x-ray diffraction(HRXRD),atomic force microscopy(AFM),and Fourier transform infrared(FTIR)spectrometer are used to characterize the material growth quality.The results show that the full width at half maximum(FWHM)of the superlattice zero-order diffraction peak,the mismatching of the superlattice zero-order diffraction peak between the substrate diffraction peaks,and the surface roughness get the best results when the beam-equivalent pressure(BEP)ratio reaches the optimal value,which are 28 arcsec,13 arcsec,and 1.63?,respectively.The intensity of the zero-order diffraction peak is strongest at the optimal value.The relative spectral response of the LWIR detector shows that it exhibits a 100%cut-off wavelength of 12.6μm at 77 K.High-quality epitaxial materials have laid a good foundation for preparing high-performance LWIR detector.展开更多
基金Project supported by the National Key Technologies Research and Development Program of China(Grant Nos.2019YFA0705203,2019YFA070104,2018YFA0209102,and 2018YFA0209104)the Major Program of the National Natural Science Foundation of China(Grant Nos.61790581,62004189,and 61274013)+2 种基金the Aeronautical Science Foundation of China(Grant No.20182436004)the Key Research Program of the Chinese Academy of Sciences(Grant No.XDPB22)the Research Foundation for Advanced Talents of the Chinese Academy of Sciences(Grant No.E27RBB03)。
文摘We compared the photoluminescence(PL)properties of Al In As Sb digital alloy samples with different periods grown on Ga Sb(001)substrates by molecular beam epitaxy.Temperature-dependent S-shape behavior is observed and explained using a thermally activated redistribution model within a Gaussian distribution of localized states.There are two different mechanisms for the origin of the PL intensity quenching for the Al In As Sb digital alloy.The high-temperature activation energy E_(1)is positively correlated with the interface thickness,whereas the low-temperature activation energy E_(2)is negatively correlated with the interface thickness.A quantitative high-angle annular dark-field scanning transmission electron microscopy(HAADF-STEM)study shows that the interface quality improves as the interface thickness increases.Our results confirm that E_(1)comes from carrier trapping at a state in the In Sb interface layer,while E_(2)originates from the exciton binding energy due to the roughness of the Al As interface layer.
基金the National Key Technologies R&D Program of China(Grant Nos.2019YFA0705203 and 2018YFA0209104)Major Program of the National Natural Science Foundation of China(Grant No.61790581)Aeronautical Science Foundation of China(Grant No.20182436004).
文摘High performance short-wavelength infrared PBn photodetectors based on InAs/GaSb/AlSb superlattices on GaSb substrate have been demonstrated.At 300 K,the device exhibits a 50%cut-off wavelength of~2.1μm as predicted from the band structure calculation;the device responsivity peaks at 0.85 A/W,corresponding to a quantum efficiency(QE)of 56%for 2.0μm-thick absorption region.The dark current density of 1.03×10^(-3)A/cm^(2)is obtained under 50 mV applied bias.The device exhibits a saturated dark current shot noise limited specific detectivity(D*)of 3.29×1010cm·Hz^(1/2)/W(at a peak responsivity of 2.0μm)under-50 mV applied bias.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61774130 11474248,61176127,61006085,61274013,and 61306013the Key Program for International Science and Technology Cooperation Projects of China(Grant No.2011DFA62380)the Ph.D. Programs Foundation of the Ministry of Education of China(Grant No.20105303120002)
文摘In this paper, high material quality Al_(0.4) In_(0.6) AsSb quaternary alloy on GaSb substrates is demonstrated. The quality of these epilayers is assessed using a high-resolution x-ray diffraction, Fourier transform infrared(FTIR) spectrometer,and atomic force microscope(AFM). The x-ray diffraction exhibits high order satellite peaks with a measured period of 31.06 ?(theoretical value is 30.48 ?), the mismatch between the GaSb substrate and AlInAsSb achieves-162 arcsec,and the root-mean square(RMS) roughness for typical material growths has achieved around 1.6 ? over an area of 10 μm×10 μm. At room temperature, the photoluminescence(PL) spectrum shows a cutoff wavelength of 1.617 μm.
基金Supported by the National Natural Science Foundation of China(61774130,11474248,61790581,51973070)the Ph.D.Pro⁃grams Foundation of Ministry of Education of China(20105303120002)National Key Technology Research and Development Program of the Ministry of Sci⁃ence and Technology of China(2018YFA0209101).
基金Project supported by the National Key Technology R&D Program of China(Grant No.2018YFA0209104)the Key R&D Program of Guangdong Province,China(Grant No.2018B030329001)the Major Program of the National Natural Science Foundation of China(Grant No.61790581)。
文摘The eight-band κ·p model is used to establish the energy band structure model of the type-II InAs/GaSb superlattice detectors with a cut-off wavelength of 10.5μm,and the best composition of M-structure in this type of device is calculated theoretically.In addition,we have also experimented on the devices designed with the best performance to investigate the effect of the active region p-type doping temperature on the quantum efficiency of the device.The results show that the modest active region doping temperature(Be:760℃)can improve the quantum efficiency of the device with the best performance,while excessive doping(Be:>760℃)is not conducive to improving the photo response.With the best designed structure and an appropriate doping concentration,a maximum quantum efficiency of 45% is achieved with a resistance-area product of 688?·cm^2,corresponding to a maximum detectivity of 7.35×10^11cm·Hz^1/2/W.
基金supported by the National Basic Research Program of China(Grant Nos.2018YFA0209102 and 2019YFA070104)the National Natural Science Foundation of China(Grant Nos.61790581 and 61274013)the Key Research Program of the Chinese Academy of Sciences(Grant No.XDPB22)。
文摘The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solution(citric acid,phosphoric acid,hydrogen peroxide,deionized water),the best solution ratio is obtained.After comparing different passivation materials such as sulfide+SiO_(2),Al_(2)O_(3),Si_(3)N_(4) and SU8,it is found that SU8 passivation can reduce the dark current of the device to a greater degree.Combining this wet etching and SU8 passivation,the of VLWIR detector with a mesa diameter of 500μm is about 3.6Ω·cm^(2) at 77 K.
基金Project supported by the National Key Technology R&D Program of China(Grant Nos.2018YFA0209104,2018YFA0209102,2019YFA0705203,and2019YFA070104)the National Natural Science Foundation of China(Grant Nos.61790581,61274013,and 62004189)the Key Research Program of the Chinese Academy of Sciences(Grant No.XDPB22).
文摘By optimizing theⅤ/Ⅲbeam-equivalent pressure ratio,a high-quality InAs/GaSb type-Ⅱsuperlattice material for the long-wavelength infrared(LWIR)range is achieved by molecular beam epitaxy(MBE).High-resolution x-ray diffraction(HRXRD),atomic force microscopy(AFM),and Fourier transform infrared(FTIR)spectrometer are used to characterize the material growth quality.The results show that the full width at half maximum(FWHM)of the superlattice zero-order diffraction peak,the mismatching of the superlattice zero-order diffraction peak between the substrate diffraction peaks,and the surface roughness get the best results when the beam-equivalent pressure(BEP)ratio reaches the optimal value,which are 28 arcsec,13 arcsec,and 1.63?,respectively.The intensity of the zero-order diffraction peak is strongest at the optimal value.The relative spectral response of the LWIR detector shows that it exhibits a 100%cut-off wavelength of 12.6μm at 77 K.High-quality epitaxial materials have laid a good foundation for preparing high-performance LWIR detector.
