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氧化银薄膜的微结构对其反射率和透射率的影响 被引量:5
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作者 冯红亮 粱艳 +5 位作者 郜小勇 林清耿 张增院 马姣民 卢景霄 宁皓 《真空科学与技术学报》 EI CAS CSCD 北大核心 2010年第2期211-214,共4页
保持150℃的衬底温度不变,通过调节氧氩比(OFR=[O2]/[Ar]),利用直流反应磁控溅射技术在玻璃衬底上制备了一系列氧化银薄膜。利用X射线衍射谱、扫描电子显微镜和分光光度计重点研究了薄膜的微结构对其反射率和透射率的影响。研究表明随着... 保持150℃的衬底温度不变,通过调节氧氩比(OFR=[O2]/[Ar]),利用直流反应磁控溅射技术在玻璃衬底上制备了一系列氧化银薄膜。利用X射线衍射谱、扫描电子显微镜和分光光度计重点研究了薄膜的微结构对其反射率和透射率的影响。研究表明随着OFR的升高,氧化银薄膜呈现了从Ag+Ag2O多晶结构到Ag2O多晶结构的演变。薄膜的表面相应地呈现了从疏松的多孔结构到类金字塔结构的演变。较高的Ag2O含量和致密的表面形貌有利于薄膜可见和红外区的透光性,而较高的银含量和疏松的多孔结构则造成对光的强烈吸收,急剧地降低了薄膜的透射率和反射率。特别是在OFR为0.5条件下成功制备了具有(111)择优取向的Ag2O多晶薄膜,有效地将氧化银热分解的临界温度降低到200℃左右。 展开更多
关键词 氧化银薄膜 直流反应磁控溅射 Ag2O薄膜 快速热处理
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光快速热处理温度对氧化银多孔薄膜微结构和表面形貌演化的影响
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作者 冯红亮 梁艳 +2 位作者 郜小勇 张增院 马姣民 《真空》 CAS 北大核心 2010年第5期13-15,共3页
利用直流反应磁控溅射技术,在玻璃衬底上制备了氧化银薄膜。X射线衍射和扫描电子显微镜表明制备的氧化银薄膜主要由Ag和Ag2O组成,具有疏松、多孔的表面特征。制备的氧化银薄膜经过5 min光快速热处理后,薄膜由多晶转变为非晶;随着退火温... 利用直流反应磁控溅射技术,在玻璃衬底上制备了氧化银薄膜。X射线衍射和扫描电子显微镜表明制备的氧化银薄膜主要由Ag和Ag2O组成,具有疏松、多孔的表面特征。制备的氧化银薄膜经过5 min光快速热处理后,薄膜由多晶转变为非晶;随着退火温度由200℃升高到300℃,氧化银薄膜表面由疏松、多孔结构向沟道、坑和孔洞联通结构,再向孔洞和洼地结构演变。这些演变归结为氧化银薄膜的不稳定性和严重的表面再构的结果。 展开更多
关键词 氧化银薄膜 磁控溅射 光快速热处理 多孔薄膜
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Spectroscopic ellipsometric study of the optical properties of Ag_2O film prepared by direct-current magnetron reactive sputtering 被引量:1
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作者 郜小勇 冯红亮 +1 位作者 马姣民 张增院 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第9期291-296,共6页
The Ag2O film, as-dcposited by direct-current magnetron reactive sputtering at a substrate temperature of 150 ℃, clearly shows a preferential orientation (111), and is capable of lowering the threshold value of the... The Ag2O film, as-dcposited by direct-current magnetron reactive sputtering at a substrate temperature of 150 ℃, clearly shows a preferential orientation (111), and is capable of lowering the threshold value of the thermal decomposition temperature to about 200℃, which is helpful to its application in optical and magneto-optical storage. This paper fits its optical constants in terms of a general oscillator model by using measured ellipsometric parameters. The fitted oscillator energy 2.487 eV is close to the optical direct interband transition energy value of the Ag2O film determined by Tauc equation; whereas, the fitted oscillator energy 4.249 eV is far from the fitted plasma oscillator energy 4.756 eV by single-oscillator energy. The photoluminescence spectrum centred at about 2.31 eV indicates a direct-energy gap photoluminescence mechanism of the Ag2O film. 展开更多
关键词 Ag2O film spectroscopic ellipsometry general oscillator model single-oscillator model
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Effect of substrate temperature on microstructure and optical properties of single-phased Ag_2O film deposited by using radio-frequency reactive magnetron sputtering method
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作者 马姣民 梁艳 +7 位作者 郜小勇 张增院 陈超 赵孟珂 杨仕娥 谷锦华 陈永生 卢景霄 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第5期323-327,共5页
Using a radio-frequency reactive magnetron sputtering technique, a series of the single-phased Ag20 films are deposited in a mixture of oxygen and argon gas with a flow ratio of 2:3 by changing substrate temperature ... Using a radio-frequency reactive magnetron sputtering technique, a series of the single-phased Ag20 films are deposited in a mixture of oxygen and argon gas with a flow ratio of 2:3 by changing substrate temperature (Ts). Effects of the Ts on the microstructure and optical properties of the films are investigated by using X-ray diffractometry, scanning electron microscopy and spectrophotometry. The single-phased Ag20 films deposited at values of Ts below 200℃ are (111) preferentially oriented, which may be due to the smallest free energy of the (111) crystalline face. The film crystallization becomes poor as the value of Ts increases from 100℃ to 225℃. In particular, the Ag20 film deposited at Ts=225℃ loses the (111) preferential orientation. Correspondingly, the film surface morphology obviously evolves from a uniform and compact surface structure to a loose and gullied surface structure. With the increase of Ts value, the transmissivity and the reflectivity of the films in the transparent region are gradually reduced, while the absorptivity gradually increases, which may be attributed to an evolution of the crystalline structure and the surface morphology of the films. 展开更多
关键词 Ag20 film radio-frequency reactive magnetron sputtering optical properties MICROSTRUCTURE
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Effects of the sputtering power on the crystalline structure and optical properties of the silver oxide films deposited using direct-current reactive magnetron sputtering
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作者 郜小勇 张增院 +3 位作者 马姣民 卢景霄 谷锦华 杨仕娥 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第2期370-375,共6页
This paper reports that a series of silver oxide (AgzO) films are deposited on glass substrates by direct-current reactive magnetron sputtering at a substrate temperature of 250 ℃ and an oxygen flux ratio of 15:18... This paper reports that a series of silver oxide (AgzO) films are deposited on glass substrates by direct-current reactive magnetron sputtering at a substrate temperature of 250 ℃ and an oxygen flux ratio of 15:18 by modifying the sputtering power (SP). The AgxO films deposited apparently show a structural evolution from cubic biphased (AgO + Ag20) to cubic single-phased (Ag20), and to biphased (Ag20 + AgO) structure. Notably, the cubic single-phased Ag20 fihn is deposited at the SP = 105 W and an AgO phase with (220) orientation discerned in the Ag^O films deposited using the SP 〉 105 W. The transmissivity and refiectivity of the AgxO films in transparent region decrease with the increase the SP, whereas the absorptivity inversely increases with the increase of the SP. These results may be due to the structural evolution and the increasing film thickness. A redshift of the films' absorption edges determined in terms of Tauc formula clearly occurs from 3.1 eV to 2.73 eV with the increase of the SP. 展开更多
关键词 Ag2O film direct-current reactive magnetron sputtering x-ray diffraction optical prop-erties
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Effects of Rapid Thermal Processing on Microstructure and Optical Properties of As-Deposited Ag2O Films by Direct-Current Reactive Magnetron Sputtering
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作者 郜小勇 冯红亮 +2 位作者 张增院 马姣民 卢景霄 《Chinese Physics Letters》 SCIE CAS CSCD 2010年第2期235-238,共4页
(111) preferentially oriented Ag2O film deposited by direct current reactive magnetron sputtering is annealed by rapid thermal processing at different annealing temperatures for 5 min. The film microstructure and op... (111) preferentially oriented Ag2O film deposited by direct current reactive magnetron sputtering is annealed by rapid thermal processing at different annealing temperatures for 5 min. The film microstructure and optical properties are then characterized by x-ray diffractometry, scanning electron microscopy, and spectrophotometry, respectively. The results indicate that no clear Ag diffraction peak is discernable in the Ag2O film annealed below 200°C. In comparison, the Ag2O film annealed at 200°C begins to exhibit characteristic Ag diffraction peaks, and in particular the Ag2O film annealed at 250°C can demonstrate enhanced Ag diffraction peaks. This implies that the threshold of the thermal decomposition reaction to produce Ag particles is approximately 200°C for the Ag2O film. In addition, an evolution of the film surface morphology from compact and pyramid-like to a rough and porous structure clearly occurred with increasing annealing temperature. The porous structure might be attributable to the escape of the oxygen produced during annealing, while the rough surface might originate from the reconstruction of the surface. The dispersion of interference peak intensity in the reflectance and transmission spectra could be attributed to the Ag particles produced. The lowered crystallinity and Ag particles produced induce a lattice defect, which results in an enhanced transmissivity in the violet region and a weakened transmissivity in the infrared region. 展开更多
关键词 Semiconductors Surfaces interfaces and thin films Condensed matter: structural mechanical & thermal
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反应气压对直流磁控反应溅射制备的氧化银薄膜的结构和光学性质的影响 被引量:2
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作者 张增院 郜小勇 +2 位作者 冯红亮 马姣民 卢景霄 《物理学报》 SCIE EI CAS CSCD 北大核心 2011年第1期486-491,共6页
利用直流磁控反应溅射技术,通过调节反应气压(RP),在250℃衬底温度下制备了一系列氧化银(AgxO)薄膜,并利用X射线衍射谱、能量色散谱和分光光度计重点研究了RP对AgxO薄膜的结构和光学性质的影响.研究结果表明,随着RP从0.5Pa升高到3.5Pa,... 利用直流磁控反应溅射技术,通过调节反应气压(RP),在250℃衬底温度下制备了一系列氧化银(AgxO)薄膜,并利用X射线衍射谱、能量色散谱和分光光度计重点研究了RP对AgxO薄膜的结构和光学性质的影响.研究结果表明,随着RP从0.5Pa升高到3.5Pa,薄膜明显呈现了从两相(AgO+Ag2O)到单相(Ag2O)结构再到两相(Ag2O+AgO)结构的演变.特别是在RP=2.5Pa时成功制备了单相Ag2O薄膜,使AgxO薄膜的热分解临界温度的有效降低成为现实.AgxO薄膜透明区的透射率随RP的增加而增加,而反射率和吸收率随RP的增加而减小.该结果可归结于薄膜相结构的演变和薄膜厚度的减小.两相(AgO+Ag2O)薄膜的吸收边在2.75eV附近,而单相(Ag2O)和Ag2O相占主导的两相(Ag2O+AgO)薄膜的吸收边在2.5eV附近. 展开更多
关键词 氧化银薄膜 直流磁控反应溅射 X射线衍射谱 光学性质
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真空热退火温度对单相Ag_2O薄膜微结构和光学性质的影响 被引量:1
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作者 张增院 郜小勇 +2 位作者 冯红亮 马姣民 卢景霄 《物理学报》 SCIE EI CAS CSCD 北大核心 2011年第3期442-447,共6页
利用直流磁控反应溅射技术在玻璃衬底上沉积了单相Ag2O薄膜,并采用真空热退火对单相Ag2O薄膜在不同热退火温度(TA)下进行了1h热处理.利用X射线衍射谱、扫描电子显微镜和分光光度计研究了TA对单相Ag2O薄膜微结构和光学性质的影响.研究结... 利用直流磁控反应溅射技术在玻璃衬底上沉积了单相Ag2O薄膜,并采用真空热退火对单相Ag2O薄膜在不同热退火温度(TA)下进行了1h热处理.利用X射线衍射谱、扫描电子显微镜和分光光度计研究了TA对单相Ag2O薄膜微结构和光学性质的影响.研究结果表明,TA=300℃时Ag2O薄膜中开始出现Ag纳米颗粒,且随着TA的升高薄膜中Ag的含量明显增加.特别是当TA=475℃时Ag2O相完全转化为Ag.随着TA的升高,薄膜的表面形貌发生了由致密到疏松的结构演变.薄膜微结构的变化显示在真空热退火过程中伴随着Ag2O相热分解为Ag和O原子及O原子在体内的扩散和从表面的逃逸过程.薄膜的透射率、反射率和吸收率随TA的变化归结于热退火过程中Ag2O的热分解和薄膜结构的演变. 展开更多
关键词 Ag2O薄膜 热退火温度 微结构 光学性质
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直流脉冲磁控反应溅射技术制备掺铝氧化锌薄膜的研究 被引量:3
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作者 陈超 冀勇 +4 位作者 郜小勇 赵孟珂 马姣民 张增院 卢景霄 《物理学报》 SCIE EI CAS CSCD 北大核心 2012年第3期338-343,共6页
采用直流脉冲磁控反应溅射技术,在不同氧氩比(GFR)条件下玻璃衬底上制备了一系列掺铝氧化锌(AZO)薄膜,并利用X射线衍射、扫描电子显微镜和分光光度计从宏观应力和微观晶格畸变的角度研究了GFR对薄膜结构、表面形貌和光学特性的影响.制... 采用直流脉冲磁控反应溅射技术,在不同氧氩比(GFR)条件下玻璃衬底上制备了一系列掺铝氧化锌(AZO)薄膜,并利用X射线衍射、扫描电子显微镜和分光光度计从宏观应力和微观晶格畸变的角度研究了GFR对薄膜结构、表面形貌和光学特性的影响.制备的多晶AZO薄膜呈现了明显的ZnO-(103)择优取向,这归结于3 h薄膜沉积过程中伴随的退火引起的薄膜晶面能转变.随着GFR的增大,AZO薄膜内宏观拉应力先增大到最大值,随后宏观压应力随着GFR的继续增大而增大.薄膜中的宏观应力明显随着GFR从拉应力向压应力转变.这与晶格微观畸变诱导的微观应力的研究结果趋势恰恰相反.随着GFR的增加,薄膜在可见光区的平均透射率先增加后减小,薄膜晶粒尺寸诱导的晶界散射是影响薄膜透射率的主导机制. 展开更多
关键词 掺铝氧化锌薄膜 直流脉冲磁控反应溅射 光学性质 氧氩比
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