Ta and C ions extracted from a metal vapor vacuum arc ion source were implanted into H21 steel,with an implantation dose of 3×10^(17)cm^(-2),extraction acceleration 42kV,and average ion beam flux about 40μA.cm^(...Ta and C ions extracted from a metal vapor vacuum arc ion source were implanted into H21 steel,with an implantation dose of 3×10^(17)cm^(-2),extraction acceleration 42kV,and average ion beam flux about 40μA.cm^(-2).Rutherford backscattering spectrum was used to measure the surface composition after Ta or Ta+C implantation.Observation of phase induced by Ta and C implantation was carried out by x-ray diffraction analysis.Experimental results showed that the wear rate of the implanted layer dropped 30%for Ta ion implantation and by a factor of 2.5 for Ta+C dual ion implantation.Thus Ta+C dual ion implantation was found to significantly reduce the friction coefficient of H21 steel.The wear mechanisms of the implanted layer were discussed.展开更多
基金Supported by the Natural Science Foundation of Educational Committee of Jiangsu Province under Grant No.95074the National Natural Science Foundation of China under Grant No.59671051.
文摘Ta and C ions extracted from a metal vapor vacuum arc ion source were implanted into H21 steel,with an implantation dose of 3×10^(17)cm^(-2),extraction acceleration 42kV,and average ion beam flux about 40μA.cm^(-2).Rutherford backscattering spectrum was used to measure the surface composition after Ta or Ta+C implantation.Observation of phase induced by Ta and C implantation was carried out by x-ray diffraction analysis.Experimental results showed that the wear rate of the implanted layer dropped 30%for Ta ion implantation and by a factor of 2.5 for Ta+C dual ion implantation.Thus Ta+C dual ion implantation was found to significantly reduce the friction coefficient of H21 steel.The wear mechanisms of the implanted layer were discussed.