针对中性浮力实验体控制问题,提出一种动态解耦多通道复合控制算法。通过实验体受力分析,建立了其六自由度运动模型。设计了一种动态解耦神经网络,其优点在于能适应动态变化的耦合程度。采用CMAC(Cerebellar Model Articulation Control...针对中性浮力实验体控制问题,提出一种动态解耦多通道复合控制算法。通过实验体受力分析,建立了其六自由度运动模型。设计了一种动态解耦神经网络,其优点在于能适应动态变化的耦合程度。采用CMAC(Cerebellar Model Articulation Controller)和PID复合控制进行单通道控制,其优点在于结合了CMAC前馈控制的快速响应性能和PID反馈控制的强抗干扰性。经MATLAB仿真验证,提出的算法能有效控制实验体位置和姿态。调整时间短且稳态精度高,效果优于PID控制。展开更多
Production of polysilicon by chemical vapor deposition of Si HCl3with a fluidized bed reactor is a competitive technology.As equilibrium conversion can be approached in a fluidized bed reactor,a reliable thermodynamic...Production of polysilicon by chemical vapor deposition of Si HCl3with a fluidized bed reactor is a competitive technology.As equilibrium conversion can be approached in a fluidized bed reactor,a reliable thermodynamic analysis is very important.However,inconsistent thermodynamic analysis results have been reported in the literature.The present work studied the effects of thermodynamic data and species selection,and recommended that JANAF was the best Cpdata source and the minimum set of species included the following eight species:H2,HCl,Si Cl4,Si Cl2,Si HCl3,Si H2Cl2,Si H3Cl and Si.Then,the influence of operating conditions on the equilibrium was studied.For the Si HCl3–H2system,both the yield of silicon and selectivity to silicon reached their maximum at(up to 1100°C),and low pressure and high H2feed ratio were of benefit for silicon production.For the Si HCl3–Si Cl4–H2system,silicon could be produced only at 900–1400°C,and reducing pressure and increasing H2feed ratio enhanced the yield of silicon.Meanwhile,the operation map for zero net by-production of Si Cl4by directly recycling the produced Si Cl4was determined.展开更多
文摘针对中性浮力实验体控制问题,提出一种动态解耦多通道复合控制算法。通过实验体受力分析,建立了其六自由度运动模型。设计了一种动态解耦神经网络,其优点在于能适应动态变化的耦合程度。采用CMAC(Cerebellar Model Articulation Controller)和PID复合控制进行单通道控制,其优点在于结合了CMAC前馈控制的快速响应性能和PID反馈控制的强抗干扰性。经MATLAB仿真验证,提出的算法能有效控制实验体位置和姿态。调整时间短且稳态精度高,效果优于PID控制。
基金Supported by the Beijing New Star Project on Science & Technology of China(2009B35)the Program for New Century Excellent Talents in University(NCET-12-0297)
文摘Production of polysilicon by chemical vapor deposition of Si HCl3with a fluidized bed reactor is a competitive technology.As equilibrium conversion can be approached in a fluidized bed reactor,a reliable thermodynamic analysis is very important.However,inconsistent thermodynamic analysis results have been reported in the literature.The present work studied the effects of thermodynamic data and species selection,and recommended that JANAF was the best Cpdata source and the minimum set of species included the following eight species:H2,HCl,Si Cl4,Si Cl2,Si HCl3,Si H2Cl2,Si H3Cl and Si.Then,the influence of operating conditions on the equilibrium was studied.For the Si HCl3–H2system,both the yield of silicon and selectivity to silicon reached their maximum at(up to 1100°C),and low pressure and high H2feed ratio were of benefit for silicon production.For the Si HCl3–Si Cl4–H2system,silicon could be produced only at 900–1400°C,and reducing pressure and increasing H2feed ratio enhanced the yield of silicon.Meanwhile,the operation map for zero net by-production of Si Cl4by directly recycling the produced Si Cl4was determined.
