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Additional Polishing Process and the Pin-Up Speed Optimization for the Prevention of Linear Crack of BOC Chip
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作者 朱家祺 李群 +2 位作者 冯建青 孟忠 李祯森 《上海交通大学学报》 EI CAS CSCD 北大核心 2007年第S2期45-47,共3页
The thin wafer(such as BOC) is often cracked easily after Die-Attach process and large numbers of products in some semiconductor company failed as a result of crack.So it is urgent to get the solution to assure the qu... The thin wafer(such as BOC) is often cracked easily after Die-Attach process and large numbers of products in some semiconductor company failed as a result of crack.So it is urgent to get the solution to assure the quality and increase the yield.This article explained the relation of crack,the chip strength,as well as Die-Attach pin-up speed and how to solve that issue.For example,additional polishing process can significantly decrease the grind mark damage;pin-up speed optimization can make pin-up force best.So linear crack of thin chip can be avoided effectively. 展开更多
关键词 CHIP CRACK CHIP strength fracture force pin-up SPEED
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