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硅基微光学平台的设计和制作
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作者 柳瑞丛 刘媛媛 +1 位作者 陈雪 杨富华 《微纳电子技术》 北大核心 2016年第9期599-604,629,共7页
微型的、可重复装配的、硅基的微光学实验平台和操作平台对于实现光学分析仪器的微型化具有重要的研究意义。设计制作了一种硅基的微光学平台,它包含有微光学基板和微光学夹持片。首先采用有限元分析软件Comsol对微光学夹持片的关键结... 微型的、可重复装配的、硅基的微光学实验平台和操作平台对于实现光学分析仪器的微型化具有重要的研究意义。设计制作了一种硅基的微光学平台,它包含有微光学基板和微光学夹持片。首先采用有限元分析软件Comsol对微光学夹持片的关键结构即弹片进行了应力仿真,确定了弹片在被拉伸过程中断裂时的最大位移,而后在此基础上设计了一种微光学基板和几种微光学夹持片。实验中采用微电子的工艺,通过配合使用电感耦合等离子体(ICP)干法刻蚀和各向异性湿法腐蚀工艺制备了微光学基板和微光学夹持片的样品。最后将二者装配在一起,从而建立起一个硅基的微光学平台。并且,夹持片可以在基板上实现滑动和重复装配。 展开更多
关键词 微光学平台 硅基 微光学夹持片 微光学基板 微型化
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Beam multiplexing of diode laser arrays
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作者 柳瑞丛 刘媛媛 +1 位作者 陈雪 杨富华 《Journal of Semiconductors》 EI CAS CSCD 2015年第4期70-73,共4页
Design and experimental studies on the wavelength multiplexing and polarization multiplexing of diode laser arrays were carried out. First, the structure of a A1GalnAs/GaAs/AIGaAs quantum well under compressive strain... Design and experimental studies on the wavelength multiplexing and polarization multiplexing of diode laser arrays were carried out. First, the structure of a A1GalnAs/GaAs/AIGaAs quantum well under compressive strain was used because the characteristic of wavelength was easier to adjust. We obtained diode laser arrays lasing in five different wavelengths, about 760 nm, 800 nm, 860 nm, 930 nm, and 976 nm. At the same time, four edge filters were designed, and an experimental study on the beam multiplexing of diode laser arrays was carried out. Second, two beams with different polarization states were composited using a half wave plate and a polarizing beam-splitter prism. After that, the beam focusing system was designed. Ultimately, ten beams of diode laser arrays in five wavelengths and two polarization states were composited, the total output power was 196 W and the overall efficiency was 76%. The size of the output focus spot was 144 × 1330μm2, and the power density of the focused light was as high as 1.02 ×105 W/cm2. Compared with a single diode laser array, the power density of the composite beam was improved by 4.3 times. 展开更多
关键词 compressive strain diode laser arrays beam multiplexing edge filter polarizing composite
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