Laser chemical vapour deposition (LCVD), a new technology for film manufacture, is photolysing metal atoms from vapor organometallic molecules with UV laser beams and depositing them on the surface of the substrate. C...Laser chemical vapour deposition (LCVD), a new technology for film manufacture, is photolysing metal atoms from vapor organometallic molecules with UV laser beams and depositing them on the surface of the substrate. Compared with conventional technology, it has higher deposition rate and higher film purity, and can be展开更多
基金Project supported by the Science Fund of Academia Sinica
文摘Laser chemical vapour deposition (LCVD), a new technology for film manufacture, is photolysing metal atoms from vapor organometallic molecules with UV laser beams and depositing them on the surface of the substrate. Compared with conventional technology, it has higher deposition rate and higher film purity, and can be