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LASER RECRYSTALLIZED CMOS/SOI DEVICES
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作者 沈宗雍 林成鲁 +1 位作者 方芳 邹世昌 《Chinese Science Bulletin》 SCIE EI CAS 1986年第15期1070-1073,共4页
SOI (Silicon on Insulator) is an ideal material for developing high speed complementary metal-oxide-semiconductor and three dimensional large scale integrated circuits. SOI prepared by melt regrowth methods with laser... SOI (Silicon on Insulator) is an ideal material for developing high speed complementary metal-oxide-semiconductor and three dimensional large scale integrated circuits. SOI prepared by melt regrowth methods with laser beams, electron beams and moving graphite strip heaters has good quality and is suitable for 展开更多
关键词 INSULATOR graphite LPCVD COMPLEMENTARY LASER BORON doping circuits leakage strip
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THE DOPING EFFECT OF BORON ON GLOW DISCHARGE a-Si:H FILMS
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作者 吴汝麟 何宇亮 沈宗雍 《Chinese Science Bulletin》 SCIE EI CAS 1984年第9期1166-1169,共4页
We have studied the doping properties of boron in a-Si:H films prepared with glow discharge technique.In this paper we will explain our work in the following three sections.
关键词 BORON doping EXPLAIN sections resistivity amorphous MAGNITUDE grains Room ORDERS
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THE CRYSTALLIZATION OF G. D. AMORPHOUS SILICON FILMS
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作者 何宇亮 沈宗雍 颜永红 《Chinese Science Bulletin》 SCIE EI CAS 1983年第11期1466-1470,共5页
Ⅰ. INTRODUCTION Recently, the crystallization of amorphous silicon films has been reported in some literatures. The thermodynamic phase of amorphous semiconductors is unstable, therefore after a series of technologic... Ⅰ. INTRODUCTION Recently, the crystallization of amorphous silicon films has been reported in some literatures. The thermodynamic phase of amorphous semiconductors is unstable, therefore after a series of technological processing (such as annealing, doping or illumination of laser) a certain amount of microcrystal and polycrystals will come into existence 展开更多
关键词 AMORPHOUS annealing doping illumination BORON UNSTABLE TECHNOLOGICAL SILANE sharply THERMODYNAMIC
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