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非晶SiO2/Si界面缺陷及其钝化/去钝化反应机制 被引量:2
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作者 洪卓呈 左旭 《系统仿真学报》 CAS CSCD 北大核心 2020年第12期2362-2375,共14页
研究非晶二氧化硅/硅(a-SiO2/Si)界面处的硅悬挂键缺陷(即Pb类缺陷)的钝化与去钝化过程对提高器件性能具有重要意义。基于分子动力学与第一性原理计算方法,以a-SiO2和晶体Si为基础,构建了a-SiO2/Si(111)界面模型。采用CI-NEB(ClimbingIm... 研究非晶二氧化硅/硅(a-SiO2/Si)界面处的硅悬挂键缺陷(即Pb类缺陷)的钝化与去钝化过程对提高器件性能具有重要意义。基于分子动力学与第一性原理计算方法,以a-SiO2和晶体Si为基础,构建了a-SiO2/Si(111)界面模型。采用CI-NEB(ClimbingImage-NudgedElasticBand)方法分别对a-SiO2/Si(111)界面的Pb缺陷分别于氢气和氢原子的钝化、去钝化反应进行了研究。明确了基于非晶二氧化硅/硅界面缺陷模型的钝化、去钝化反应的反应曲线、反应势垒以及反应的过渡态结构。 展开更多
关键词 第一性原理 a-SiO2/Si(111)界面 钝化/去钝化 NEB方法
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First-principles calculations of the hole-induced depassivation of SiO2/Si interface defects
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作者 Zhuo-Cheng Hong Pei Yao +1 位作者 Yang Liu Xu Zuo 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第5期575-581,共7页
The holes induced by ionizing radiation or carrier injection can depassivate saturated interface defects.The depassivation of these defects suggests that the deep levels associated with the defects are reactivated,aff... The holes induced by ionizing radiation or carrier injection can depassivate saturated interface defects.The depassivation of these defects suggests that the deep levels associated with the defects are reactivated,affecting the performance of devices.This work simulates the depassivation reactions between holes and passivated amorphous-SiO_(2)/Si interface defects(HP_(b)+h→P_(b)+H^(+)).The climbing image nudged elastic band method is used to calculate the reaction curves and the barriers.In addition,the atomic charges of the initial and final structures are analyzed by the Bader charge method.It is shown that more than one hole is trapped by the defects,which is implied by the reduction in the total number of valence electrons on the active atoms.The results indicate that the depassivation of the defects by the holes actually occurs in three steps.In the first step,a hole is captured by the passivated defect,resulting in the stretching of the Si-H bond.In the second step,the defect captures one more hole,which may contribute to the breaking of the Si-H bond.The H atom is released as a proton and the Si atom is three-coordinated and positively charged.In the third step,an electron is captured by the Si atom,and the Si atom becomes neutral.In this step,a Pb-type defect is reactivated. 展开更多
关键词 a-SiO_(2)/Si interface HOLE depassivation first-principles calculation
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