Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7 e V and the microhardness of 40-55 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid i...Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7 e V and the microhardness of 40-55 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid is observed. The filrn microhardness is improved with the increase of ion kinetic energy of plasma plume from 300 to 600 eV. The characteristics of DLC film deposition with fs pulses is discussed.展开更多
Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLCfilms. By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the ave...Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLCfilms. By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laserenergy density, and the distance from the target are investigated. The relation of the properties of de-posited films with the plasma characteristics is studied.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No.19835030.
文摘Hydrogen-free diamond-like carbon (DLC) films with the optical band gaps of 2.0-2.7 e V and the microhardness of 40-55 GPa are deposited by femtosecond KrF laser pulses. The film microstructure of nanometer spheroid is observed. The filrn microhardness is improved with the increase of ion kinetic energy of plasma plume from 300 to 600 eV. The characteristics of DLC film deposition with fs pulses is discussed.
文摘Pulsed KrF lasers of two different durations (30 ns, 500 fs) are used to deposit DLCfilms. By optical emission spectroscopy and ion probe, the composite species of laser generated plas-ma plume are identified, the average kinetic energy of ions, the plume flux and their variation with laserenergy density, and the distance from the target are investigated. The relation of the properties of de-posited films with the plasma characteristics is studied.
