Study of leakage current degradation based on stacking faults expansion in irradiated SiC junction barrier Schottky diodes

A comprehensive investigation was conducted to explore the degradation mechanism of leakage current in SiC junction barrier Schottky(JBS)diodes under heavy ion irradiation.We propose and verify that the generation of stacking faults(SFs)induced by the recombination of massive electron-hole pairs during irradiation is the cause of reverse leakage current degradation based on experiments results.The irradiation experiment was carried out based on Ta ions with high linear energy transfer(LET)of 90.5 MeV/(mg/cm^(2)).It is observed that the leakage current of the diode undergoes the permanent increase during irradiation when biased at 20%of the rated reverse voltage.Micro-PL spectroscopy and PL micro-imaging were utilized to detect the presence of SFs in the irradiated SiC JBS diodes.We combined the degraded performance of irradiated samples with SFs introduced by heavy ion irradiation.Finally,three-dimensional(3D)TCAD simulation was employed to evaluate the excessive electron-hole pairs(EHPs)concentration excited by heavy ion irradiation.It was observed that the excessive hole concentration under irradiation exceeded significantly the threshold hole concentration necessary for the expansion of SFs in the substrate.The proposed mechanism suggests that the process and material characteristics of the silicon carbide should be considered in order to reinforcing against the single event effect of SiC power devices.

一种带P型埋层的4H-SiC PiN二极管

碳化硅(SiC)PiN二极管是应用在高压大功率整流领域中的一种重要的功率二极管。受SiC外延材料的载流子寿命限制以及常规SiC PiN二极管较低的阳极注入效率的影响,SiC PiN二极管的正向导通性能较差,这极大限制了其在高压大电流领域的应用。文章提出了一种带P型埋层的4H-SiC PiN二极管,较常规SiC PiN二极管增强了阳极区的少子注入效率,降低了器件的导通电阻,增大了正向电流。仿真结果表明,当正向偏压为5 V时,引入P型埋层的SiC PiN二极管的正向电流密度比常规SiC PiN二极管提升了52.8%。