We employ an aluminum (Al) film as a thermal conduction layer under the laser thermal lithography AgInSbTe phase-change film to improve the patterning resolution in laser thermal lithography.The patterns were fabricat...We employ an aluminum (Al) film as a thermal conduction layer under the laser thermal lithography AgInSbTe phase-change film to improve the patterning resolution in laser thermal lithography.The patterns were fabricated by laser writing and wet-etching.The laser writing was conducted by a setup where the laser wavelength and the numerical aperture of the converging lens were 405nm and 0.90,respectively.The wet-etching was carried out in a 17wt% ammonium sulfide solution.Experimental results indicate that the patterning resolution enhancement induced by an Al thermal conduction layer is more than 20% compared with that of the samples without an Al thermal conduction layer.The analysis reveals that the resolution-enhancing effect may be due to the changes of heat diffusion directions induced by the Al thermal conduction layer.展开更多
Fe：BiOx films are fabricated on K9 glass substrates by rf-magnetron sputtering of a BiFeO target under argon atmosphere with increasing sputtering power from 80 to 200 W at room temperature. It is found that the thin...Fe：BiOx films are fabricated on K9 glass substrates by rf-magnetron sputtering of a BiFeO target under argon atmosphere with increasing sputtering power from 80 to 200 W at room temperature. It is found that the thin films grown at the sputtering power of 160 W can be formed at an appropriate deposition rate and have an improved surface morphology. The XPS result reveals that the films investigated are comprised of Bi, Fe and O elements. A typical XRD pattern shows that no phase transition occurs in the films up to 400℃. The results of the blue laser recording test demonstrate that the Fe：BiOx films have good writing sensitivity for blue laser beam （406.7nm） and good stability after reading 10000 times. The recording marks of 200nm or less are obtained. These results indicate that the introduction of Fe into BiOx films can reduce the mark size and improve the stability of the films.展开更多
SbOx thin films are deposited by reactive dc-magnetron sputtering from an antimony metal target in Ar＋O2 with the relative O2 content 7%. It is found that the as-deposited films can represent a two-component system c...SbOx thin films are deposited by reactive dc-magnetron sputtering from an antimony metal target in Ar＋O2 with the relative O2 content 7%. It is found that the as-deposited films can represent a two-component system comprising amorphous Sb and amorphous Sb2 O3. The crystallization of Sb is responsible for the changes of optical properties of the films. The results of the static test show that the SbOx thin films have good writing sensitivity for blue laser beams and the recording marks are very clear and circular. High reflectivity contrast of about 41% is obtained at a writing power 6mW and writing pulse width 300ns. In addition, the films show a good stability after reading 10000 times.展开更多
In this paper, the spin-coated thin films of phthalocyanine dye are presented. Absorption spectrum of the thin film shows a comparatively broad absorption in the wavelength range 630 - 770 nm. Optical parameters of th...In this paper, the spin-coated thin films of phthalocyanine dye are presented. Absorption spectrum of the thin film shows a comparatively broad absorption in the wavelength range 630 - 770 nm. Optical parameters of the thin film were measured by a spectroscopic ellipsometer system. 5-in CD-R discs made of this dye exhibit good performance with Yamaha 20-speed recorder. Jitters of land and pit are less than 30 ns, and the 3T-11T's signals show very good quality. This dye is a promising recording medium for CD-R with much higher recording speed.展开更多
基金Supported by the National Natural Science Foundation of China under Grant Nos 61137002 and 61178059.
文摘We employ an aluminum (Al) film as a thermal conduction layer under the laser thermal lithography AgInSbTe phase-change film to improve the patterning resolution in laser thermal lithography.The patterns were fabricated by laser writing and wet-etching.The laser writing was conducted by a setup where the laser wavelength and the numerical aperture of the converging lens were 405nm and 0.90,respectively.The wet-etching was carried out in a 17wt% ammonium sulfide solution.Experimental results indicate that the patterning resolution enhancement induced by an Al thermal conduction layer is more than 20% compared with that of the samples without an Al thermal conduction layer.The analysis reveals that the resolution-enhancing effect may be due to the changes of heat diffusion directions induced by the Al thermal conduction layer.
基金Supported by the National Natural Science Foundation of China under Grant No 50672108 and 60644002.
文摘Fe：BiOx films are fabricated on K9 glass substrates by rf-magnetron sputtering of a BiFeO target under argon atmosphere with increasing sputtering power from 80 to 200 W at room temperature. It is found that the thin films grown at the sputtering power of 160 W can be formed at an appropriate deposition rate and have an improved surface morphology. The XPS result reveals that the films investigated are comprised of Bi, Fe and O elements. A typical XRD pattern shows that no phase transition occurs in the films up to 400℃. The results of the blue laser recording test demonstrate that the Fe：BiOx films have good writing sensitivity for blue laser beam （406.7nm） and good stability after reading 10000 times. The recording marks of 200nm or less are obtained. These results indicate that the introduction of Fe into BiOx films can reduce the mark size and improve the stability of the films.
基金Supported by the National High-Technology Development Programme of China under Grant No 2004AA31G230, and the National Natural Science Foundation of China under Grant Nos 50672108 and 60644002.
文摘SbOx thin films are deposited by reactive dc-magnetron sputtering from an antimony metal target in Ar＋O2 with the relative O2 content 7%. It is found that the as-deposited films can represent a two-component system comprising amorphous Sb and amorphous Sb2 O3. The crystallization of Sb is responsible for the changes of optical properties of the films. The results of the static test show that the SbOx thin films have good writing sensitivity for blue laser beams and the recording marks are very clear and circular. High reflectivity contrast of about 41% is obtained at a writing power 6mW and writing pulse width 300ns. In addition, the films show a good stability after reading 10000 times.
文摘In this paper, the spin-coated thin films of phthalocyanine dye are presented. Absorption spectrum of the thin film shows a comparatively broad absorption in the wavelength range 630 - 770 nm. Optical parameters of the thin film were measured by a spectroscopic ellipsometer system. 5-in CD-R discs made of this dye exhibit good performance with Yamaha 20-speed recorder. Jitters of land and pit are less than 30 ns, and the 3T-11T's signals show very good quality. This dye is a promising recording medium for CD-R with much higher recording speed.
