This article presents simulation results on the effects of neutral gas flow for nanoparticle transport in atmospheric-pressure,radio-frequency,capacitively-coupled,and acetylene discharge.The acetylene gas is set to f...This article presents simulation results on the effects of neutral gas flow for nanoparticle transport in atmospheric-pressure,radio-frequency,capacitively-coupled,and acetylene discharge.The acetylene gas is set to flow into the chamber from the upper showerhead electrode.The internal energy of the gas medium therein is transferred into kinetic energy so the gas advection can be triggered.This is represented by the pressure volume work term of the gas energy converse equation.The gas advection leads to the gas temperature sink at the gas inlet,hence a large gas temperature gradient is formed.The thermophoresis relies on the gas temperature gradient,and causes the profile of nanoparticle density to vary from a double-peak structure to a single-peak one.The gas advection influences the properties of electron density and temperature as well and causes the drift-ambipolar mode profile of electron density asymmetric.In the bulk region,i.e.away from the inlet,the gas advection is more like one isovolumetric compression,which slightly increases the temperature of the gas medium at consuming its kinetic energy.展开更多
A two-dimensional multi-fluid model is developed to investigate the effects of dilution gas on microplasma properties and nanoparticle behavior in atmospheric-pressure radio-frequency acetylene discharges.The percenta...A two-dimensional multi-fluid model is developed to investigate the effects of dilution gas on microplasma properties and nanoparticle behavior in atmospheric-pressure radio-frequency acetylene discharges.The percentage of dilution gases(argon and helium)percentage varied from 0%to 90%,with the pressure kept constant.Simulation results show that the dilution gas percentage has a significant influence on the spatial distributions of the electron density and temperature,as well as on the formation of nanoparticles in acetylene microplasmas.With increasing dilution gas percentage,the electron density profile changes continuously from being high at the edge to high in the center.A mode transition from a mixed discharge mode with bothαregime and drift-ambipolar regime intoαregime occurs,which is associated with a sudden decrease in the electron density of the presheaths and an increase in the electron temperature of the bulk plasma.The mode transition point corresponds to the lowest number density ratio of hydrocarbon ions to acetylene.The highest number density ratio is observed at a dilution percentage of 90%,and causes more effective nucleation and coagulation of nanoparticles.Furthermore,owing to the high ionization potential of helium,the transition point moves to a larger dilution gas percentage in C_(2)H_(2)/He microplasmas.Finally,the growth of nanoparticles via coagulation is studied.展开更多
基金supported by National Natural Science Foundation of China(Nos.11805107 and 12275039)the Fundamental Research Funds in Heilongjiang Provincial Universities of China(No.135509124)the Graduate Innovation Foundation of Qiqihar University(No.YJSCX2022014)。
文摘This article presents simulation results on the effects of neutral gas flow for nanoparticle transport in atmospheric-pressure,radio-frequency,capacitively-coupled,and acetylene discharge.The acetylene gas is set to flow into the chamber from the upper showerhead electrode.The internal energy of the gas medium therein is transferred into kinetic energy so the gas advection can be triggered.This is represented by the pressure volume work term of the gas energy converse equation.The gas advection leads to the gas temperature sink at the gas inlet,hence a large gas temperature gradient is formed.The thermophoresis relies on the gas temperature gradient,and causes the profile of nanoparticle density to vary from a double-peak structure to a single-peak one.The gas advection influences the properties of electron density and temperature as well and causes the drift-ambipolar mode profile of electron density asymmetric.In the bulk region,i.e.away from the inlet,the gas advection is more like one isovolumetric compression,which slightly increases the temperature of the gas medium at consuming its kinetic energy.
基金supported by the Fundamental Research Funds in Heilongjiang Provincial Universities of China (No. 135509124)National Natural Science Foundation of China (No. 11805107)the Graduate Innovation Foundation of Qiqihar University, China (No. YJSCX2021017)
文摘A two-dimensional multi-fluid model is developed to investigate the effects of dilution gas on microplasma properties and nanoparticle behavior in atmospheric-pressure radio-frequency acetylene discharges.The percentage of dilution gases(argon and helium)percentage varied from 0%to 90%,with the pressure kept constant.Simulation results show that the dilution gas percentage has a significant influence on the spatial distributions of the electron density and temperature,as well as on the formation of nanoparticles in acetylene microplasmas.With increasing dilution gas percentage,the electron density profile changes continuously from being high at the edge to high in the center.A mode transition from a mixed discharge mode with bothαregime and drift-ambipolar regime intoαregime occurs,which is associated with a sudden decrease in the electron density of the presheaths and an increase in the electron temperature of the bulk plasma.The mode transition point corresponds to the lowest number density ratio of hydrocarbon ions to acetylene.The highest number density ratio is observed at a dilution percentage of 90%,and causes more effective nucleation and coagulation of nanoparticles.Furthermore,owing to the high ionization potential of helium,the transition point moves to a larger dilution gas percentage in C_(2)H_(2)/He microplasmas.Finally,the growth of nanoparticles via coagulation is studied.
