Highly epitaxial YBa2Cu3O7-δ （YBCO） and yttria-stabilized zirconia （YSZ） bilayer thin films have been deposited on silicon-on-insulator （SOI） substrates by using in situ pulsed laser deposition （PLD） techniqu...Highly epitaxial YBa2Cu3O7-δ （YBCO） and yttria-stabilized zirconia （YSZ） bilayer thin films have been deposited on silicon-on-insulator （SOI） substrates by using in situ pulsed laser deposition （PLD） technique. In the experiment, the native amorphous SiO2 layers on some of the SOI substrates are removed by dipping them in a 10% HF solution for 15 s. Comparing several qualities of films grown on substrates with or without HF pretreatment, such as thin film crystallinity, general surface roughness, temperature dependence of resistance, surface morphology, as well as average crack spacing and crack width, naturally leads to the conclusion that preserving the native SiO2 layer on the surface of the SOI substrate can not only simplify the experimental process but can also achieve fairly high quality YSZ and YBCO thin films.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant Nos 50672125 and 10574154)the Natural Science Foundation of Shanxi Province, China (Grant No 2009011003-1)the Youth Foundation of Shanxi Datong University, China (Grant No 2007Q10)
文摘Highly epitaxial YBa2Cu3O7-δ （YBCO） and yttria-stabilized zirconia （YSZ） bilayer thin films have been deposited on silicon-on-insulator （SOI） substrates by using in situ pulsed laser deposition （PLD） technique. In the experiment, the native amorphous SiO2 layers on some of the SOI substrates are removed by dipping them in a 10% HF solution for 15 s. Comparing several qualities of films grown on substrates with or without HF pretreatment, such as thin film crystallinity, general surface roughness, temperature dependence of resistance, surface morphology, as well as average crack spacing and crack width, naturally leads to the conclusion that preserving the native SiO2 layer on the surface of the SOI substrate can not only simplify the experimental process but can also achieve fairly high quality YSZ and YBCO thin films.
