Ultraviolet(UV) photodetectors(PDs) have drawn great attention in recent years due to their potential application in civil and military fields. Because of its ultrawide bandgap, low cost, strong radiation hardness, an...Ultraviolet(UV) photodetectors(PDs) have drawn great attention in recent years due to their potential application in civil and military fields. Because of its ultrawide bandgap, low cost, strong radiation hardness, and high thermal and chemical stability with high visible-light transparency, Ga_2O_3 is regarded as the most promising candidate for UV detection.Furthermore, the bandgap of Ga_2O_3 is as high as 4.7–4.9 eV, directly corresponding to the solar-blind UV detection band with wavelength less than 280 nm. There is no need of doping in Ga_2O_3 to tune its bandgap, compared to AlGaN, MgZnO,etc, thereby avoiding alloy composition fluctuations and phase separation. At present, solar-blind Ga_2O_3 photodetectors based on single crystal or amorphous Ga_2O_3 are mainly focused on metal–semiconductor–metal and Schottky photodiodes.In this work, the recent achievements of Ga_2O_3 photodetectors are systematically reviewed. The characteristics and performances of different photodetector structures based on single crystal Ga_2O_3 and amorphous Ga_2O_3 thin film are analyzed and compared. Finally, the prospects of Ga_2O_3 UV photodetectors are forecast.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61521064,61522408,61574169,61334007,61474136,and 61574166)the Ministry of Science and Technology of China(Grant Nos.2018YFB0406504,2016YFA0201803,2016YFA0203800,and 2017YFB0405603)+1 种基金the Key Research Program of Frontier Sciences of Chinese Academy of Sciences(Grant Nos.QYZDB-SSW-JSC048 and QYZDY-SSW-JSC001)the Beijing Municipal Science and Technology Project,China(Grant No.Z171100002017011)
文摘Ultraviolet(UV) photodetectors(PDs) have drawn great attention in recent years due to their potential application in civil and military fields. Because of its ultrawide bandgap, low cost, strong radiation hardness, and high thermal and chemical stability with high visible-light transparency, Ga_2O_3 is regarded as the most promising candidate for UV detection.Furthermore, the bandgap of Ga_2O_3 is as high as 4.7–4.9 eV, directly corresponding to the solar-blind UV detection band with wavelength less than 280 nm. There is no need of doping in Ga_2O_3 to tune its bandgap, compared to AlGaN, MgZnO,etc, thereby avoiding alloy composition fluctuations and phase separation. At present, solar-blind Ga_2O_3 photodetectors based on single crystal or amorphous Ga_2O_3 are mainly focused on metal–semiconductor–metal and Schottky photodiodes.In this work, the recent achievements of Ga_2O_3 photodetectors are systematically reviewed. The characteristics and performances of different photodetector structures based on single crystal Ga_2O_3 and amorphous Ga_2O_3 thin film are analyzed and compared. Finally, the prospects of Ga_2O_3 UV photodetectors are forecast.
基金supported by the National Natural Science Foundation of China(61925110,U20A20207,61821091,62004184,62004186,62171426,51932004,and 51961145110)the Strategic Priority Research Program of the Chinese Academy of Sciences(CAS)(XDB44000000)+4 种基金the Key Research Program of Frontier Sciences of CAS(QYZDB-SSW-JSC048)the Key-Area Research and Development Program of Guangdong Province(2020B010174002)the Fundamental Research Plan(JCKY2020110B010)the CAS Project for Young Scientists in Basic Research(YSBR-029)the Key Laboratory of Nanodevices and Applications at Suzhou Institute of Nano-Tech and Nano-Bionics of CAS。
