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Fabrication of anodized aluminum oxide membrane with nanometer pores
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作者 张正富 杨显万 +2 位作者 赵云臣 陈庆华 孙俊赛 《中国有色金属学会会刊:英文版》 CSCD 2003年第2期298-301,共4页
The pure aluminum and Al Mg Mn alloy were anodized in 4%, 10% and 18.5% phosphoric acid solution, respectively. As for pure Al, the maximum thickness of anodized aluminum oxide (AAO) membrane, 216 nm, is obtained by b... The pure aluminum and Al Mg Mn alloy were anodized in 4%, 10% and 18.5% phosphoric acid solution, respectively. As for pure Al, the maximum thickness of anodized aluminum oxide (AAO) membrane, 216 nm, is obtained by being anodized in 4% solution. Its average pore diameter is around 70 nm, and pore density exceeds 10 10 /cm 2. Under the same technology condition, the membrane thickness decreases with increment of electrolyte content. TEM images show that element Mg or Mn added into aluminum alloy can damage the integration of AAO membrane. During anodizing of aluminum, the formed oxide layer is amorphous. After being annealed at 600 ℃ for 24 h, it is still amorphous. However, when membrane is annealed at 930 ℃, the amorphous oxide begins to transform to γ Al 2O 3 . 展开更多
关键词 氧化铝 薄膜 阳极氧化 制造 微孔
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