Hydrogenated amorphous silicon oxide(a-SiOx:H) is an attractive passivation material to suppress epitaxial growth and reduce the parasitic absorption loss in silicon heterojunction(SHJ) solar cells. In this paper, a-S...Hydrogenated amorphous silicon oxide(a-SiOx:H) is an attractive passivation material to suppress epitaxial growth and reduce the parasitic absorption loss in silicon heterojunction(SHJ) solar cells. In this paper, a-SiOx:H layers on different orientated c-Si substrates are fabricated. An optimal effective lifetime(τ(eff)) of 4743 μs and corresponding implied opencircuit voltage(iV(oc)) of 724 mV are obtained on〈100〉-orientated c-Si wafers. While τ(eff) of 2429 μs and iV_(oc) of 699 mV are achieved on 111-orientated substrate. The FTIR and XPS results indicate that the a-SiOx:H network consists of SiOx(Si-rich), Si–OH, Si–O–SiHx, SiO2 ≡ Si–Si, and O3 ≡ Si–Si. A passivation evolution mechanism is proposed to explain the different passivation results on different c-Si wafers. By modulating the a-SiOx:H layer, the planar silicon heterojunction solar cell can achieve an efficiency of 18.15%.展开更多
The silicon heterojunction(SHJ)solar cell has long been considered as one of the most promising candidates for the next-generation PV market.Transition metal oxides(TMOs)show good carrier selectivity when combined wit...The silicon heterojunction(SHJ)solar cell has long been considered as one of the most promising candidates for the next-generation PV market.Transition metal oxides(TMOs)show good carrier selectivity when combined with c-Si solar cells.This has led to the rapid demonstration of the remarkable potential of TMOs(especially MoO_(x))with high work function to replace the p-type a-Si:H emitting layer.MoO_(x) can induce a strong inversion layer on the interface of n-type c-Si,which is beneficial to the extraction and conduction of holes.In this paper,the radio-frequency(RF)magnetron sputtering is used to deposit MoO_(x) films.The optical,electrical and structural properties of MoO_(x) films are measured and analyzed,with focus on the inherent compositions and work function.Then the MoO_(x) films are applied into SHJ solar cells.When the MoO_(x) works as a buffer layer between ITO/p-a-Si:H interface in the reference SHJ solar cell,a conversion efficiency of 19.1%can be obtained.When the MoOx is used as a hole transport layer(HTL),the device indicates a desirable conversion efficiency of 17.5%.To the best of our knowledge,this current efficiency is the highest one for the MoO_(x) film as HTL by RF sputtering.展开更多
基金Project supported by the National Key Research and Deveopment Program of China(Grant No.2018YFB1500402)the National Natural Science Foundation of China(Grant Nos.61674084 and 61874167)+5 种基金the Fundamental Research Funds for Central Universities,Chinathe Natural Science Foundation of Tianjin City,China(Grant No.17JCYBJC41400)the Open Fund of the Key Laboratory of Optical Information Science&Technology of Ministry of Education of China(Grant No.2017KFKT014)the 111 Project,China(Grant No.B16027)the International Cooperation Base,China(Grant No.2016D01025)Tianjin International Joint Research and Development Center,China。
文摘Hydrogenated amorphous silicon oxide(a-SiOx:H) is an attractive passivation material to suppress epitaxial growth and reduce the parasitic absorption loss in silicon heterojunction(SHJ) solar cells. In this paper, a-SiOx:H layers on different orientated c-Si substrates are fabricated. An optimal effective lifetime(τ(eff)) of 4743 μs and corresponding implied opencircuit voltage(iV(oc)) of 724 mV are obtained on〈100〉-orientated c-Si wafers. While τ(eff) of 2429 μs and iV_(oc) of 699 mV are achieved on 111-orientated substrate. The FTIR and XPS results indicate that the a-SiOx:H network consists of SiOx(Si-rich), Si–OH, Si–O–SiHx, SiO2 ≡ Si–Si, and O3 ≡ Si–Si. A passivation evolution mechanism is proposed to explain the different passivation results on different c-Si wafers. By modulating the a-SiOx:H layer, the planar silicon heterojunction solar cell can achieve an efficiency of 18.15%.
基金Project supported by the National Natural Science Foundation of China(Grant No.62074084)the National Key Research and Development Program of China(Grant No.2018YFB1500402)Key Research and Development Program of Hebei Province,China(Grant No.20314303D).
文摘The silicon heterojunction(SHJ)solar cell has long been considered as one of the most promising candidates for the next-generation PV market.Transition metal oxides(TMOs)show good carrier selectivity when combined with c-Si solar cells.This has led to the rapid demonstration of the remarkable potential of TMOs(especially MoO_(x))with high work function to replace the p-type a-Si:H emitting layer.MoO_(x) can induce a strong inversion layer on the interface of n-type c-Si,which is beneficial to the extraction and conduction of holes.In this paper,the radio-frequency(RF)magnetron sputtering is used to deposit MoO_(x) films.The optical,electrical and structural properties of MoO_(x) films are measured and analyzed,with focus on the inherent compositions and work function.Then the MoO_(x) films are applied into SHJ solar cells.When the MoO_(x) works as a buffer layer between ITO/p-a-Si:H interface in the reference SHJ solar cell,a conversion efficiency of 19.1%can be obtained.When the MoOx is used as a hole transport layer(HTL),the device indicates a desirable conversion efficiency of 17.5%.To the best of our knowledge,this current efficiency is the highest one for the MoO_(x) film as HTL by RF sputtering.
