On the origin of carrier localization in AlInAsSb digital alloy

We compared the photoluminescence(PL)properties of Al In As Sb digital alloy samples with different periods grown on Ga Sb(001)substrates by molecular beam epitaxy.Temperature-dependent S-shape behavior is observed and explained using a thermally activated redistribution model within a Gaussian distribution of localized states.There are two different mechanisms for the origin of the PL intensity quenching for the Al In As Sb digital alloy.The high-temperature activation energy E_(1)is positively correlated with the interface thickness,whereas the low-temperature activation energy E_(2)is negatively correlated with the interface thickness.A quantitative high-angle annular dark-field scanning transmission electron microscopy(HAADF-STEM)study shows that the interface quality improves as the interface thickness increases.Our results confirm that E_(1)comes from carrier trapping at a state in the In Sb interface layer,while E_(2)originates from the exciton binding energy due to the roughness of the Al As interface layer.

High-performance extended short-wavelength infrared PBn photodetectors based on InAs/GaSb/AlSb superlattices

High performance short-wavelength infrared PBn photodetectors based on InAs/GaSb/AlSb superlattices on GaSb substrate have been demonstrated.At 300 K,the device exhibits a 50%cut-off wavelength of~2.1μm as predicted from the band structure calculation;the device responsivity peaks at 0.85 A/W,corresponding to a quantum efficiency(QE)of 56%for 2.0μm-thick absorption region.The dark current density of 1.03×10^(-3)A/cm^(2)is obtained under 50 mV applied bias.The device exhibits a saturated dark current shot noise limited specific detectivity(D*)of 3.29×1010cm·Hz^(1/2)/W(at a peak responsivity of 2.0μm)under-50 mV applied bias.

高性能锑化物超晶格中红外探测器研究进展(特邀)

中红外探测技术作为一种重要的被动探测手段,在各个领域都有着非常重要的作用。其中,以InAs/InAsSb超晶格材料为基础的无Ga型Sb化物II类超晶格探测器,由于去除了Ga原子的缺陷,具有更高的少子寿命,有利于提高探测器性能。此外,使用光子晶体结构,进行表面光学性能调控,可以提高器件的响应度,从而降低材料吸收区厚度,降低器件暗电流。暗电流的降低和响应度的提升,进一步优化了探测器的性能,进而提高器件工作温度,进一步降低探测系统的体积、重量和功耗。研究表明:使用光子晶体结构可以在不改变外延材料结构的前提下,提高器件量子效率,实现响应光谱的展宽,在实际应用中具有重要的意义。文中综述和讨论了InAs/InAsSb超晶格探测器和光子晶体结构探测器材料生长、结构设计的主要技术问题,详细介绍了两种提高中红外探测器性能的方案及国内外的研究进展。

Etching mask optimization of InAs/GaSb superlattice mid-wavelength infared 640×512 focal plane array

In this paper we focused on the mask technology of inductively coupled plasma（ICP） etching for the mesa fabrication of infrared focal plane arrays（FPA）.By using the SiO_2 mask,the mesa has higher graphics transfer accuracy and creates less micro-ripples in sidewalls.Comparing the IV characterization of detectors by using two different masks,the detector using the SiO_2 hard mask has the R_0A of 9.7×10~6 Ω·cm^2,while the detector using the photoresist mask has the R_0A of3.2 × 10~2 Ω·cm^2 in 77 K.After that we focused on the method of removing the remaining SiO_2 after mesa etching.The dry ICP etching and chemical buffer oxide etcher（BOE） based on HF and NH4 F are used in this part.Detectors using BOE only have closer R_0A to that using the combining method,but it leads to gaps on mesas because of the corrosion on AlSb layer by BOE.We finally choose the combining method and fabricated the 640×512 FPA.The FPA with cutoff wavelength of 4.8 μm has the average R_0A of 6.13 × 10~9 Ω·cm^2 and the average detectivity of 4.51 × 10~9 cm·Hz^（1/2）.W^（-1）at 77 K.The FPA has good uniformity with the bad dots rate of 1.21%and the noise equivalent temperature difference（NEDT） of 22.9 mK operating at 77 K.

基于InAs/GaSb二类超晶格的中/长波双色红外探测器

InAs/GaSb二类超晶格是一种通过在纳米尺寸上交替生长周期性异质结而构造的人工体材料,其有效带隙可以覆盖40~400meV。该量子体系材料不仅具有良好的均匀性,还拥有出色的光学特性,其电子有效质量高、光吸收系数大、量子效率高,已经成为第三代红外焦平面探测器的热门材料。本文利用分子束外延技术生长了背靠背势垒型中/长波双色红外探测器材料,通过标准工艺和阳极硫化技术,成功制备双波段NMπP-PπMN型红外探测器。在77K,中波峰值量子效率为32%,长波峰值量子效率为27%,50%截止波长分别为4.7μm和7.9μm。中波信号在+2V偏压下饱和,暗电流密度为0.06A/cm^2,长波信号在-1.4V偏压下饱和,暗电流密度为8.7A/cm^2。

中波InAs/GaSb超晶格红外焦平面探测器

由分子束外延生长的GaSb基的InAs/GaSb超晶格材料具有良好的均匀性,其在制作红外焦平面探测器方面有独特的优势。分别采用生长中断和表面迁移率增强的分子束外延法在GaSb衬底上生长了中波段InAs/GaSb超晶格红外探测器材料,对比表明对于中波超晶格材料,生长中断法优于表面迁移率增强法。利用标准工艺制作了中波红外PIN单元探测器,并制备了320×256的焦平面探测器芯片。

Low Crosstalk Three-Color Infrared Detector by Controlling the Minority Carriers Type of InAs/GaSb Superlattices for Middle-Long and Very-Long Wavelength

We report a type-Ⅱ InAs/GaSb superlattice three-color infrared detector for mid-wave （MW）, long-wave （LW）, and very long-wave （VLW） detections. The detector structure consists of three contacts of NIPIN architecture for MW and LW detections, and hetero-junction NIP architecture for VLW detection. It is found that the spectral crosstalks can be significantly reduced by controlling the minority carriers transport via doping beryllium in the two active regions of NIPIN section. The crosstalk detection at MW, LW, and VLW signals are achieved by selecting the bias voltages on the device. At 77K, the cutoff wavelengths of the three-color detection are 5.3μm （at OmV）, 141μm （at 300mV） and 19μm （at -20mV） with the detectivities of 4.6xlO11 cm.Hzl/ZW-1, 2.3×10^10 cm.Hzl/2W-1, and 1.0×10^10cm.Hzl/2W-1 for MW, LW and VLW. The crosstalks of the MW channel, LW channel, and VLW channel are almost 0, 0.25, and 0.6, respectively.

Very long wavelength infrared focal plane arrays with 50% cutoff wavelength based on type-Ⅱ In As/GaSb superlattice

A very long wavelength infrared（VLWIR） focal plane array based on In As/Ga Sb type-Ⅱ super-lattices is demonstrated on a Ga Sb substrate. A hetero-structure photodiode was grown with a 50% cut-off wavelength of 15.2 μm, at 77 K.A 320×256 VLWIR focal plane array with this design was fabricated and characterized. The peak quantum efficiency without an antireflective coating was 25.74% at the reverse bias voltage of-20 mV, yielding a peak specific detectivity of 5.89×10^10cm·Hz^1/2·W^-1. The operability and the uniformity of response were 89% and 83.17%. The noise-equivalent temperature difference at 65 K exhibited a minimum at 21.4 mK, corresponding to an average value of 56.3 mK.

Wet Chemical Etching of Antimonide-Based Infrared Materials

The roughness and the crystallographic orientation selectivity of etched antimonide-based infrared materials are examined and are used to optimize the chemical mesa etching process of the InAs/GaSb superlattice photodiode with the goal of reducing the dark current. The etehant used is based on phosphoric acid （H3PO4）, citric acid （C6H8O7） and hydrogen peroxide （H2O2）. The roughness of the mesa sidewalls and etching rates are compared and used to find an optimized etchant, with which we obtain optimized mid-wavelength infrared photodiodes possessing an RoA value of 466 Ω·cm2 and a detectivity of 1.43 ×1011 cm.Hz1/2 W-1. Crystallographic orientation selectivity is seen in InAs etching, and also is seen in the InAs/GaSb superlattice wet chemical etching process.

High quantum efficiency long-/long-wave dual-color type-Ⅱ InAs/GaSb infrared detector

A long-/long-wave dual-color detector with N-M-π-B-π-M-N structure was developed based on a type-Ⅱ InAs/GaSb superlattice. The saturated responsivity was achieved under low bias voltage for both channels. The device could be operated as a single detector for sequential detection and showed high quantum efficiencies. The peak quantum efficiencies of long-wavelength infrared band-1(blue channel) and long-wavelength infrared band-2(red channel) were 44% at 6.3 μm under 20 mV and 57% at 9.1 μm under-60 mV, respectively. The optical performance for each channel was achieved using a 2 μm thickness absorber. Due to the high QE, the specific detectivities of the blue and red channels reached5.0×10^(11) cm·Hz^(1/2)/W at 6.8 μm and 3.1×10^(11) cm·Hz1^(1/2)/W at 9.1 μm, respectively, at 77 K.

Spectral dynamical behavior in two-section, quantum well,mode-locked laser at 1.064 μm

In this study, two-section mode-locked semiconductor lasers with different numbers of quantum wells and different types of waveguide structures are made. Their ultrashort pulse features are presented. The spectral dynamical behaviors in these lasers are studied in detail. In the simulation part, a two-band compressive-strained quantum well（QW） model is used to study thermally induced band-edge detuning in the amplifier and saturable absorber（SA）. A sudden blue shift in laser spectrum is expected by calculating the peak of the net gain. In the experiment part, the sudden blue shift in the emission spectrum is observed in triple QW samples under certain operating conditions but remains absent in single QW samples.Experimental results reveal that blue shift phenomenon is connected with the difference between currents in two sections.Additionally, a threshold current ratio for blue-shift is also demonstrated.

Wet etching and passivation of GaSb-based very long wavelength infrared detectors

The etching and passivation processes of very long wavelength infrared(VLWIR)detector based on the InAs/GaSb/AlSb type-II superlattice have been studied.By studying the effect of each component in the citric acid solution(citric acid,phosphoric acid,hydrogen peroxide,deionized water),the best solution ratio is obtained.After comparing different passivation materials such as sulfide+SiO_(2),Al_(2)O_(3),Si_(3)N_(4) and SU8,it is found that SU8 passivation can reduce the dark current of the device to a greater degree.Combining this wet etching and SU8 passivation,the of VLWIR detector with a mesa diameter of 500μm is about 3.6Ω·cm^(2) at 77 K.

Growth of high material quality InAs/GaSb type-Ⅱ superlattice for long-wavelength infrared range by molecular beam epitaxy

By optimizing theⅤ/Ⅲbeam-equivalent pressure ratio,a high-quality InAs/GaSb type-Ⅱsuperlattice material for the long-wavelength infrared(LWIR)range is achieved by molecular beam epitaxy(MBE).High-resolution x-ray diffraction(HRXRD),atomic force microscopy(AFM),and Fourier transform infrared(FTIR)spectrometer are used to characterize the material growth quality.The results show that the full width at half maximum(FWHM)of the superlattice zero-order diffraction peak,the mismatching of the superlattice zero-order diffraction peak between the substrate diffraction peaks,and the surface roughness get the best results when the beam-equivalent pressure(BEP)ratio reaches the optimal value,which are 28 arcsec,13 arcsec,and 1.63?,respectively.The intensity of the zero-order diffraction peak is strongest at the optimal value.The relative spectral response of the LWIR detector shows that it exhibits a 100%cut-off wavelength of 12.6μm at 77 K.High-quality epitaxial materials have laid a good foundation for preparing high-performance LWIR detector.

Performance of dual-band short-or mid-wavelength infrared photodetectors based on InGaAsSb bulk materials and InAs/GaSb superlattices

In this paper,we demonstrate bias-selectable dual-band short-or mid-wavelength infrared photodetectors based on In0.24Ga0.76As0.21Sb0.79 bulk materials and InAs/GaSb type-II superlattices with cutoff wavelengths of 2.2μm and 3.6μm,respectively.At 200 K,the short-wave channel exhibits a peak quantum efficiency of 42%and a dark current density of5.93×10^-5）/cm^2at 500 mV,thereby providing a detectivity of 1.55×10^11cm·Hz^1/2/W.The mid-wave channel exhibits a peak quantum efficiency of 31%and a dark current density of 1.22×10^-3A/cm^2at-300 mV,thereby resulting in a detectivity of 2.71×10^10cm·Hz^1/2/W.Moreover,we discuss the band alignment and spectral cross-talk of the dual-band n-i-p-p-i-n structure.

锑化镓基量子阱2μm大功率激光器

使用固态源MBE系统进行锑化镓基量子阱激光器结构的外延生长，通过优化稳定生长条件，结合标准宽条形激光器制备工艺，获得了在15工作温度下823mW的连续光输出，注入电流0．5A时，峰值波长为1．98μm。在1000Hz，5％占空比的脉冲工作模式下，最大脉冲功率达到1．868W。

High power laser diodes of 2 μm AlGaAsSb/InGaSb type I quantum-wells

2μm A1GaAsSb/InGaSb type-I quantum-well high-power laser diodes （LDs） are grown using molec- ular beam epitaxy. Stripe-type waveguide single LD （single emitter） and array LD （four emitters） devices without facet coatings are fabricated. For the single LDs （single emitter） device, the maximum output power under contin- uous wave （CW） operation is 0.5 W at 10℃ with a threshold current density of 150 A/cm^2 and a slope efficiency of 0.17 W/A, the output powers under the pulse mode in the 5% duty cycles are much higher, up to 0.98 W. For the array LD devices, the maximum output powers are 1.02 W under the CW mode and 3.03 W under the pulse mode at room temperature.