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垂直结构GaN基LEDs热压键合应力损伤分析
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作者 刘志强 王良臣 +3 位作者 伊晓燕 郭恩卿 王国宏 李晋闽 《半导体技术》 CAS CSCD 北大核心 2009年第10期1011-1013,共3页
热压键合是垂直结构LED制备的关键工艺步骤,通过TEM,PL,Raman等测试手段,探讨热压键合造成的应力损伤、GaN材料缺陷、LED内量子效率以及反向漏电间的内在联系,研究以键合引起的应力诱导垂直结构GaN基LED光电特性的退化机制,探讨应力损... 热压键合是垂直结构LED制备的关键工艺步骤,通过TEM,PL,Raman等测试手段,探讨热压键合造成的应力损伤、GaN材料缺陷、LED内量子效率以及反向漏电间的内在联系,研究以键合引起的应力诱导垂直结构GaN基LED光电特性的退化机制,探讨应力损伤对垂直结构GaN基LED光电特性的影响。实验结果表明,热压键合过程会在GaN材料内产生GPa量级的残余应力,在量子限制strark效应作用下,GaN材料辐射复合效率发生明显退化;同时热压键合应力还会诱发GaN材料位错密度的增加,最终导致LED反向漏电增大。 展开更多
关键词 热压键合 氮化镓 应力损伤 反向漏电
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Optical and electrical characteristics of GaN vertical light emitting diode with current block layer 被引量:2
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作者 郭恩卿 刘志强 +2 位作者 汪炼成 伊晓燕 王国宏 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第6期47-50,共4页
A GaN vertical light emitting diode(LED)with a current block layer(CBL)was investigated.Vertical LEDs without a CBL,with a non-ohmic contact CBL and with a silicon dioxide CBL were fabricated.Optical and electrica... A GaN vertical light emitting diode(LED)with a current block layer(CBL)was investigated.Vertical LEDs without a CBL,with a non-ohmic contact CBL and with a silicon dioxide CBL were fabricated.Optical and electrical tests were carried out.The results show that the light output power of vertical LEDs with a non-ohmic contact CBL and with a silicon dioxide CBL are 40.6%and 60.7%higher than that of vertical LEDs without a CBL at 350 mA,respectively.The efficiencies of vertical LEDs without a CBL,with a non-ohmic contact CBL and with a silicon dioxide CBL drop to 72%,78%and 85.5%of their maximum efficiency at 350 mA,respectively. Moreover,vertical LEDs with a non-ohmic contact CBL have relatively superior anti-electrostatic ability. 展开更多
关键词 current block layer efficiency drop vertical LED non-ohmic contact
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Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface 被引量:2
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作者 汪炼成 郭恩卿 +2 位作者 刘志强 伊晓燕 王国宏 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第2期61-64,共4页
Low resistance and thermally stable n-type contacts to N-polar GaN are essentially important for vertical light emitting diodes (VLEDs). The electrical characteristics of VLEDs with n-type contacts on a roughened an... Low resistance and thermally stable n-type contacts to N-polar GaN are essentially important for vertical light emitting diodes (VLEDs). The electrical characteristics of VLEDs with n-type contacts on a roughened and flat N-polar surface have been compared. VLEDs with contacts deposited on a roughened surface exhibit lower leakage currents yet a higher operating voltage. Based on this, a new scheme by depositing metallization contacts on a selectively wet-etching roughened surface has been developed. Excellent electrical and optical characteristics have been achieved with this method. An aging test further confirmed its stability. 展开更多
关键词 metallization contacts wet etching surface roughening polarization
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Effects of the p-AlInGaN/GaN superlattices' structure on the performance of blue LEDs
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作者 刘娜 伊晓燕 +10 位作者 梁萌 郭恩卿 冯向旭 司朝 姬小利 魏学成 路红喜 刘志强 张宁 王军喜 李晋闽 《Journal of Semiconductors》 EI CAS CSCD 2014年第2期72-75,共4页
The advantages of the p-AIInGaN/GaN superlattices' (SLs) structure as an electron blocking layer (EBL) for InGaN blue light-emitting diodes (LEDs) were studied by experiment and APSYS simulation. Elec- trolumin... The advantages of the p-AIInGaN/GaN superlattices' (SLs) structure as an electron blocking layer (EBL) for InGaN blue light-emitting diodes (LEDs) were studied by experiment and APSYS simulation. Elec- troluminescence (EL) measurement results show that the LEDs with the p-AllnGaN/GaN SLs' structure EBL ex- hibited better optical performance compared with the conventional A1GaN EBL due to the enhancement of hole concentration and hole carrier transport efficiency, and the confinement of electrons' overflow between multiple quantum-wells (MQWs) and EBL. 展开更多
关键词 EBL p-AllnGaN/GaN SLs multiple quantum-wells
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