In the research of inertial confinement fusion （ICF）, diagnosis of soft x-ray spectra radiated from pellet implosion is a crucial approach to compre- hend the space-time characteristic of plasma and the laser-plasma...In the research of inertial confinement fusion （ICF）, diagnosis of soft x-ray spectra radiated from pellet implosion is a crucial approach to compre- hend the space-time characteristic of plasma and the laser-plasma interactions. Conventional black- white transmission grating （TG） as a speetrophotom- etry element has been widely used in the region of op- tical measurements. However, the inherent high-order diffraction of black-white TG can overlap the informa- tion from the first order diffraction. The uncertainty of unfolding the complex process is the main diffi- culty in precise spectral analysis, which greatly hin- ders being able to stripe out the reasonably physical information. Quantum-dot-array diffraction grat- ing （QDADG） proposed by Cao, where the trans- mittance distribution obeys the sine form exactly, is an ideal amplitude TG and has perfect properties of pro- ducing just one pair of conjugate first order diffraction lines and suppressing the high order diffraction.The traditional fabrication technique for QDADG is the electron beam lithography （EBL） and the x-ray lithog- raphy （XRL）. Owing to its capability of gen- erating patterns and the high resolution, EBL plays an increasingly important role in the micromachining, and is recognized as the main approach of fabricating a mask. The fabrication of nanoscale patterns with steep cross section is the superiority of XRL, which possesses the advantages of high efficiency, nanoscale resolution and great penetration capability. On the basis of the above-mentioned processing technique, 1000 line/mm quasi-sinusoidal single-order diffraction TG with the minimal feature structure of 500 nm was reported by Kuang et al., and can be applied in the ICF research. For single order diffraction grating, unfortunately, the promotion and application of EBL and XRL are restricted by the complex process, long period, difficult manufacture and the existence of the supporting film that absorbs x-rays and distorts the light information.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No 60908023, the Science Foundation of the Chinese Academy of Engineering Physics under Grant No 2014A0408, and the Open Foundation of Key Laboratory for Nonmetal Composites and Functional Materials of the Siehuan Province of China under Grant No llzxfkl9.
文摘In the research of inertial confinement fusion （ICF）, diagnosis of soft x-ray spectra radiated from pellet implosion is a crucial approach to compre- hend the space-time characteristic of plasma and the laser-plasma interactions. Conventional black- white transmission grating （TG） as a speetrophotom- etry element has been widely used in the region of op- tical measurements. However, the inherent high-order diffraction of black-white TG can overlap the informa- tion from the first order diffraction. The uncertainty of unfolding the complex process is the main diffi- culty in precise spectral analysis, which greatly hin- ders being able to stripe out the reasonably physical information. Quantum-dot-array diffraction grat- ing （QDADG） proposed by Cao, where the trans- mittance distribution obeys the sine form exactly, is an ideal amplitude TG and has perfect properties of pro- ducing just one pair of conjugate first order diffraction lines and suppressing the high order diffraction.The traditional fabrication technique for QDADG is the electron beam lithography （EBL） and the x-ray lithog- raphy （XRL）. Owing to its capability of gen- erating patterns and the high resolution, EBL plays an increasingly important role in the micromachining, and is recognized as the main approach of fabricating a mask. The fabrication of nanoscale patterns with steep cross section is the superiority of XRL, which possesses the advantages of high efficiency, nanoscale resolution and great penetration capability. On the basis of the above-mentioned processing technique, 1000 line/mm quasi-sinusoidal single-order diffraction TG with the minimal feature structure of 500 nm was reported by Kuang et al., and can be applied in the ICF research. For single order diffraction grating, unfortunately, the promotion and application of EBL and XRL are restricted by the complex process, long period, difficult manufacture and the existence of the supporting film that absorbs x-rays and distorts the light information.
