A four-channel 400 GHz spacing flat focal field arrayed waveguide grating (AWG) demultiplexer is designed based on polymerie optical waveguide. The waveguide core-layer material is a newly developed negative tone epox...A four-channel 400 GHz spacing flat focal field arrayed waveguide grating (AWG) demultiplexer is designed based on polymerie optical waveguide. The waveguide core-layer material is a newly developed negative tone epoxy Novolak resin (ENR) polymer with ultravoilel (UV) cured resin Norland optical adhesive 61 (NOA61) as the clodding layer. The device is fabricated using electron-beam direct writing, which has less professing steps than the reported polymeric AWGs. The experimental result is presented.展开更多
High-Q lithium niobate(LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in ...High-Q lithium niobate(LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ~0.3 d B=cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.展开更多
基金the National Natural Science Foundation of China(10574058),Research Grants Council of Hong Kong,China(CityU1194/02E),and TWAS of UNESCO,Trieste,Italy,[RGA(01-137 RG/PHYS/AS)]
文摘A four-channel 400 GHz spacing flat focal field arrayed waveguide grating (AWG) demultiplexer is designed based on polymerie optical waveguide. The waveguide core-layer material is a newly developed negative tone epoxy Novolak resin (ENR) polymer with ultravoilel (UV) cured resin Norland optical adhesive 61 (NOA61) as the clodding layer. The device is fabricated using electron-beam direct writing, which has less professing steps than the reported polymeric AWGs. The experimental result is presented.
基金supported by the National Natural Science Foundation of China(No.61922092)Research Grants Council,University Grants Committee(No.City U 21208219)City University of Hong Kong(Nos.9667182,9610402,and 9610455)。
文摘High-Q lithium niobate(LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ~0.3 d B=cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.
