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离子注入的方块电阻规范
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作者 Lawrence a.larson +1 位作者 张义强 龙华 《微电子技术》 1994年第3期59-63,共5页
本文给出了制备离子注入的规范参考样品(SRM)的方法。这将为离子注入设备及测试设备的检测和验证提供可靠的手段,规范参考样品应该是硅片,硅片经由特定的杂质,确定的能量和剂量注入,且其平均方块电阻和均匀性都有明确的说明。这... 本文给出了制备离子注入的规范参考样品(SRM)的方法。这将为离子注入设备及测试设备的检测和验证提供可靠的手段,规范参考样品应该是硅片,硅片经由特定的杂质,确定的能量和剂量注入,且其平均方块电阻和均匀性都有明确的说明。这里提到的规范阐明了许多协作组织的工作经验,同时回顾了已往的研究成果。并考虑来自注入机厂商和使用厂家的结果。最后给出了在工艺过程中对各种重要参数起关键作用的灵敏度曲线的制备方法。 展开更多
关键词 离子注入 方块电阻 规范
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Search for two-neutrino double-beta decay of^(136)Xe to the 0^(+)_(1)excited state of 136Ba with the complete EXO-200 dataset
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作者 S.Al Kharusi G.Anton +104 位作者 I.Badhrees P.S.Barbeau D.Beck V.Belov T.Bhatta M.Breidenbach T.Brunner G.F.Cao W.R.Cen C.Chambers B.Cleveland M.Coon A.Craycraft T.Daniels L.Darroch S.J.Daugherty J.Davis S.Delaquis A.Der Mesrobian-Kabakian R.DeVoe J.Dilling A.Dolgolenko M.J.Dolinski J.Echevers W.Fairbank Jr. D.Fairbank J.Farine S.Feyzbakhsh P.Fierlinger Y.S.Fu D.Fudenberg P.Gautam R.Gornea G.Gratta C.Hall E.V.Hansen J.Hoessl P.Hufschmidt M.Hughes A.Iverson A.Jamil C.Jessiman M.J.Jewell A.Johnson A.Karelin L.J.Kaufman T.Koffas R.Krücken A.Kuchenkov K.S.Kumar Y.Lan a.larson B.G.Lenardo D.S.Leonard G.S.Li S.Li Z.Li C.Licciardi Y.H.Lin R.MacLellan T.McElroy T.Michel B.Mong D.C.Moore K.Murray O.Njoya O.Nusair A.Odian I.Ostrovskiy A.Perna A.Piepke A.Pocar F.Retière A.L.Robinson P.C.Rowson J.Runge S.Schmidt D.Sinclair K.Skarpaas A.K.Soma V.Stekhanov M.Tarka S.Thibado J.Todd T.Tolba T.I.Totev R.Tsang B.Veenstra V.Veeraraghavan P.Vogel J.-L.Vuilleumier M.Wagenpfeil J.Watkins M.Weber L.J.Wen U.Wichoski G.Wrede S.X.Wu Q.Xia D.R.Yahne L.Yang Y.-R.Yen O.Ya.Zeldovich T.Ziegler 《Chinese Physics C》 SCIE CAS CSCD 2023年第10期1-9,共9页
A new search for two-neutrino double-beta(2νββ)decay of^(136)Xe to the 0+1 excited state of 136Ba is performed with the full EXO-200 dataset.A deep learning-based convolutional neural network is used to discriminat... A new search for two-neutrino double-beta(2νββ)decay of^(136)Xe to the 0+1 excited state of 136Ba is performed with the full EXO-200 dataset.A deep learning-based convolutional neural network is used to discriminate signal from background events.Signal detection efficiency is increased relative to previous searches by EXO-200 by more than a factor of two.With the addition of the Phase II dataset taken with an upgraded detector,the median 90%confidence level half-life sensitivity of 2νββdecay to the 0+1 state of 136Ba is 2.9×10^(24)yr using a total^(136)Xe exposure of 234.1 kg yr.No statistically significant evidence for 2νββdecay to the 0^(+)_(1)state is observed,leading to a lower limit of T2ν1/2(0^(+)→0^(+)_(1))>1.4×10^(24)yr at 90%confidence level,improved by 70%relative to the current world's best constraint. 展开更多
关键词 EXO-200 experiment neutrinoless double beta decay excited state
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