The recent emergence of thin-film lithium niobate(TFLN)has extended the landscape of integrated photonics.This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high...The recent emergence of thin-film lithium niobate(TFLN)has extended the landscape of integrated photonics.This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching.However,fabrication imperfections still limit the propagation loss to a few dB/m,restricting the impact of this platform.Here,we demonstrate TFLN microresonators with a record-high intrinsic quality(Q)factor of twenty-nine million,corresponding to an ultra-low propagation loss of 1.3 dB/m.We present spectral analysis and the statistical distribution of Q factors across different resonator geometries.Our work pushes the fabrication limits of TFLN photonics to achieve a Q factor within 1 order of magnitude of the material limit.展开更多
基金Defense Advanced Research Projects Agency(HR001120C0137)U.S.Navy(N68335-22-C-0413)+6 种基金Air Force Office of Scientific Research(FA9550-20-1-01015)Air Force Research Laboratory(FA864921P0781)National Aeronautics and Space Administration(80NSSC22K0262,80NSSC23PB442)National Science Foundation(EEC-1941583,OMA-2137723,2138068)Office of Naval Research(N00014-22-C-1041)National Institutes of Health(5R21EY031895-02)National Research Foundation of Korea。
文摘The recent emergence of thin-film lithium niobate(TFLN)has extended the landscape of integrated photonics.This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching.However,fabrication imperfections still limit the propagation loss to a few dB/m,restricting the impact of this platform.Here,we demonstrate TFLN microresonators with a record-high intrinsic quality(Q)factor of twenty-nine million,corresponding to an ultra-low propagation loss of 1.3 dB/m.We present spectral analysis and the statistical distribution of Q factors across different resonator geometries.Our work pushes the fabrication limits of TFLN photonics to achieve a Q factor within 1 order of magnitude of the material limit.
