In this work,on-chip chalcogenide glass photonic integrations with several fundamental photonic building blocks are designed and fabricated based on the As2 S3 platform for improved 2μm optical interconnection,achiev...In this work,on-chip chalcogenide glass photonic integrations with several fundamental photonic building blocks are designed and fabricated based on the As2 S3 platform for improved 2μm optical interconnection,achieving a broadened wavelength bandwidth and improved fabrication tolerance.A 600 nm thick As2 S3 strip waveguide has low propagation loss of 1.447 dB/cm at 2μm.Broadband vertical coupling is realized by a grating coupler with 4.3 dB coupling loss.A Bragg grating filter,power splitter,Mach–Zander interferometer,and mode converter for on-chip mode division multiplexing(MDM)are also reported at 2μm with reliable performances.Finally,a record high MDM optical interconnection capacity of 3×80 Gbps at 2μm is experimentally demonstrated based on the proposed As2 S3 chip,drawing promising prospects for future photonic integration and high-speed interconnection at the 2μm waveband.展开更多
基金National Key Research and Development Program of China(2018YFB1801004)Ministry of Science and Technology of the People’s Republic of China(2018YFB1801003)+3 种基金National Natural Science Foundation of China(61675128,61875049,61875124,61935011,61975242)Guangzhou Science and Technology Program key projects(201904020048)Pearl River S&T Nova Program of Guangzhou(2017BT01X121)Science and Technology Planning Project of Guangdong Province(2019A1515010774)。
文摘In this work,on-chip chalcogenide glass photonic integrations with several fundamental photonic building blocks are designed and fabricated based on the As2 S3 platform for improved 2μm optical interconnection,achieving a broadened wavelength bandwidth and improved fabrication tolerance.A 600 nm thick As2 S3 strip waveguide has low propagation loss of 1.447 dB/cm at 2μm.Broadband vertical coupling is realized by a grating coupler with 4.3 dB coupling loss.A Bragg grating filter,power splitter,Mach–Zander interferometer,and mode converter for on-chip mode division multiplexing(MDM)are also reported at 2μm with reliable performances.Finally,a record high MDM optical interconnection capacity of 3×80 Gbps at 2μm is experimentally demonstrated based on the proposed As2 S3 chip,drawing promising prospects for future photonic integration and high-speed interconnection at the 2μm waveband.