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HF处理后Si(100)衬底的低温(900℃)外延生长
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作者 akihiro miyauchi 杨卫东 《微电子学》 CAS CSCD 1991年第3期54-57,共4页
在经HP酸处理后的Si(100)衬底上作了低温(900℃)外延。用常规的低压化学汽相淀积(LPCVD)系统作Si的淀积。经HF酸浸泡之后,外延层的堆垛层错密度(SFD)随去离子水漂洗时间的延续而猛烈增加。对HF酸处理后的氧,氟以及碳杂质用X射线光电子... 在经HP酸处理后的Si(100)衬底上作了低温(900℃)外延。用常规的低压化学汽相淀积(LPCVD)系统作Si的淀积。经HF酸浸泡之后,外延层的堆垛层错密度(SFD)随去离子水漂洗时间的延续而猛烈增加。对HF酸处理后的氧,氟以及碳杂质用X射线光电子光谱技术进行了测量。残余碳的化学键形态与HF酸的浓度相关。在5%的HF酸处理(相当于优化外延条件)后,大多以C-O键形态存在。 展开更多
关键词 HF处理 硅衬底 外延生长
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Biomimetic Riblets Inspired by Sharkskin Denticles: Digitizing, Modeling and Flow Simulation 被引量:3
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作者 Mariko Miyazaki Yuji Hirai +3 位作者 Hiroshi Moriya Masatsugu Shimomura akihiro miyauchi Hao Liu 《Journal of Bionic Engineering》 SCIE EI CSCD 2018年第6期999-1011,共13页
While sharkskin surface roughness in terms of denticle morphology has been hypothesized but remains yet controversial to be capable of achieving turbulent flow control and drag reduction, sharkskin-inspired "riblets... While sharkskin surface roughness in terms of denticle morphology has been hypothesized but remains yet controversial to be capable of achieving turbulent flow control and drag reduction, sharkskin-inspired "riblets" have been reported to be an effective biomimetic design. Here we address an integrated study of biomimetic riblets inspired by sharkskin denticles by combining 3D digitizing and mod- eling of"fresh" denticles and computational fluid dynamic modeling of turbulent flows on a rough surface with staggered denticles and hound-tooth-patterned grooves. Realistic microstructures of denticles in five shark species of Galapagos, great white, whitetip reef, blacktip reef, and hammerhead sharks were first measured and digitized in three fold: (1) 2D imaging of lubricated sharkskin in a wet state by means of a "nano-suit" technique with a Field-Emission Scanning Electron Microscope (FE-SEM); (2) 3D structures of sharkskin denticles with a micro-focus X-ray CT; and (3) single denticles of the five shark species in a 3D manner with 3D-CAD. The denticles at mid-body location in the five species were observed to have a structure of five non-uniform-ridges (herein termed "non-uniform grooves") with Angles Of Inclination (AOI) ranging over 20° - 32°. Hydrodynamics associated with the unique five-ridge denticles were then in- vestigated through modeling turbulent flow past a denticle-staggered skin surface. We further constructed a biomimetic riblet model inspired by the non-uniform grooves and investigated the hydrodynamic effects of height-to-spacing ratios of mid-ridge and side-ridges. Our results indicate that the morphological non-uniformity in sharkskin denticles likely plays a critical role in passively controlling local turbulent flow and point to the potential of denticle-inspired biomimetic riblets for turbulent-flow control in aquatic vehicles as well as other fluid machinery. 展开更多
关键词 SHARKSKIN denticles biommetic riblets 3D digitizing computational fluid dynamics
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