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Disentangling multiple scattering with deep learning:application to strain mapping from electron diffraction patterns 被引量:2
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作者 Joydeep Munshi alexander rakowski +7 位作者 Benjamin H.Savitzky Steven E.Zeltmann Jim Ciston Matthew Henderson Shreyas Cholia Andrew M.Minor Maria K.Y.Chan Colin Ophus 《npj Computational Materials》 SCIE EI CSCD 2022年第1期2419-2433,共15页
A fast,robust pipeline for strain mapping of crystalline materials is important for many technological applications.Scanning electron nanodiffraction allows us to calculate strain maps with high accuracy and spatial r... A fast,robust pipeline for strain mapping of crystalline materials is important for many technological applications.Scanning electron nanodiffraction allows us to calculate strain maps with high accuracy and spatial resolutions,but this technique is limited when the electron beam undergoes multiple scattering.Deep-learning methods have the potential to invert these complex signals,but require a large number of training examples.We implement a Fourier space,complex-valued deep-neural network,FCU-Net,to invert highly nonlinear electron diffraction patterns into the corresponding quantitative structure factor images.FCU-Net was trained using over 200,000 unique simulated dynamical diffraction patterns from different combinations of crystal structures,orientations,thicknesses,and microscope parameters,which are augmented with experimental artifacts.We evaluated FCU-Net against simulated and experimental datasets,where it substantially outperforms conventional analysis methods.Our code,models,and training library are open-source and may be adapted to different diffraction measurement problems. 展开更多
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