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Analytical model for subthreshold current and subthreshold swing of short-channel double-material-gate MOSFETs with strained-silicon channel on silicon–germanium substrates 被引量:1
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作者 Pramod kumar Tiwari Gopi Krishna Saramekala +1 位作者 Sarvesh Dubey anand kumar mukhopadhyay 《Journal of Semiconductors》 EI CAS CSCD 2014年第10期30-36,共7页
The present work gives some insight into the subthreshold behaviour of short-channel double-material- gate strained-silicon on silicon-germanium MOSFETs in terms of subthreshold swing and off-current. The formu- latio... The present work gives some insight into the subthreshold behaviour of short-channel double-material- gate strained-silicon on silicon-germanium MOSFETs in terms of subthreshold swing and off-current. The formu- lation of subthreshold current and, thereupon, the subthreshold swing have been done by exploiting the expression of potential distribution in the channel region of the device. The dependence of the subthreshold characteristics on the device parameters, such as Ge mole fraction, gate length ratio, work function of control gate metal and gate length, has been tested in detail. The analytical models have been validated by the numerical simulation results that were obtained from the device simulation software ATLASTM by Silvaco Inc. 展开更多
关键词 strained-Si channel Si1-xGex substrate dual-metal gate subthreshold current subthreshold swing
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