In this paper, the effects of the open crack on the static and dynamic pull-in volt- ages of an electrostatically actuated fixed-fixed and cantilever micro-beam are investigated. By presenting a mathematical modeling,...In this paper, the effects of the open crack on the static and dynamic pull-in volt- ages of an electrostatically actuated fixed-fixed and cantilever micro-beam are investigated. By presenting a mathematical modeling, the governing static and dynamic equations are solved by SSLM and Galerkin-based Reduced Order Model, respectively. Then, each single-side open crack in the micro-beam is modeled by a massless rotational spring and the cracked mode shapes and corresponding natural frequencies are calculated by considering the boundary and patching con- ditions and using transfer matrix methods. Finally, the effects of the crack depth ratio, crack position and crack number on the pull-in voltage of the micro-beams are studied. It is shown that beside the residual stresses created in the machining process, the crack（s） can be initiated, growth and consequently change the pull-in voltage of the system by decreasing the natural frequencies. The results show that the crack position is effective beside the crack depth ratio in decreasing the pull-in voltage. Also it is shown that in the fixed-fixed micro-beam there are several points for the crack location in which, the pull-in voltage is extremum.展开更多
文摘In this paper, the effects of the open crack on the static and dynamic pull-in volt- ages of an electrostatically actuated fixed-fixed and cantilever micro-beam are investigated. By presenting a mathematical modeling, the governing static and dynamic equations are solved by SSLM and Galerkin-based Reduced Order Model, respectively. Then, each single-side open crack in the micro-beam is modeled by a massless rotational spring and the cracked mode shapes and corresponding natural frequencies are calculated by considering the boundary and patching con- ditions and using transfer matrix methods. Finally, the effects of the crack depth ratio, crack position and crack number on the pull-in voltage of the micro-beams are studied. It is shown that beside the residual stresses created in the machining process, the crack（s） can be initiated, growth and consequently change the pull-in voltage of the system by decreasing the natural frequencies. The results show that the crack position is effective beside the crack depth ratio in decreasing the pull-in voltage. Also it is shown that in the fixed-fixed micro-beam there are several points for the crack location in which, the pull-in voltage is extremum.
