The radial distortion of projector magnetic lenses with field distributions in the form of inverse law has been theoretically studied using analytical method. The radial distortion coefficient can be expressed explici...The radial distortion of projector magnetic lenses with field distributions in the form of inverse law has been theoretically studied using analytical method. The radial distortion coefficient can be expressed explicitly in term of Bessel function of fraction order Therefore, analytical formulae for radial distortion coefficient of each projector magnetic lenses in this article have derived to computation these coefficients. Also, the dimensionless quality factors for radial distortion are calculated to estimate the performance of image in electron microscope. The results of calculations show that the increasing of order of multipole (n) leads to increase the radial distortion coefficient.展开更多
文摘The radial distortion of projector magnetic lenses with field distributions in the form of inverse law has been theoretically studied using analytical method. The radial distortion coefficient can be expressed explicitly in term of Bessel function of fraction order Therefore, analytical formulae for radial distortion coefficient of each projector magnetic lenses in this article have derived to computation these coefficients. Also, the dimensionless quality factors for radial distortion are calculated to estimate the performance of image in electron microscope. The results of calculations show that the increasing of order of multipole (n) leads to increase the radial distortion coefficient.