The objective of this work research is the use of four-point measurements and so-called Van Der Pauw methods in measuring the resistivity of copper thin films widely used in the manufacture of planar components such a...The objective of this work research is the use of four-point measurements and so-called Van Der Pauw methods in measuring the resistivity of copper thin films widely used in the manufacture of planar components such as inductor and others. Aligned configuration and square configuration are commonly used to measure thin films resistivity before use. But differences in values between the two configurations according to frequency and thickness were observed according to the authors. Measurements with both configurations on the same thin films must make it possible to know measurements evolution as a function of frequency and thickness. The observation of measuring frequency ranges of each configuration and the minimum thicknesses to have solid copper resistivity are the main contributions of the paper. This electrical characterization is carried out on copper thin films deposited on alumina substrates (50 mm × 20 mm × 635 μm) using RF sputtering technique. Copper thin films with various thicknesses (3.3 μm, 3.6 μm and 5.2 μm) were characterized. Low-frequency electrical characterization of these thin films was performed by four-point measurement method and using an HP 4284A type LCRmeter over the frequency range of 20 Hz to 1 MHz. Van der Pauw’s method was used to calculate resistivity. These studies allowed us to know influence of measurement configurations and influence of parameters such as frequency and thickness of the copper thin films on resistivity.展开更多
文摘The objective of this work research is the use of four-point measurements and so-called Van Der Pauw methods in measuring the resistivity of copper thin films widely used in the manufacture of planar components such as inductor and others. Aligned configuration and square configuration are commonly used to measure thin films resistivity before use. But differences in values between the two configurations according to frequency and thickness were observed according to the authors. Measurements with both configurations on the same thin films must make it possible to know measurements evolution as a function of frequency and thickness. The observation of measuring frequency ranges of each configuration and the minimum thicknesses to have solid copper resistivity are the main contributions of the paper. This electrical characterization is carried out on copper thin films deposited on alumina substrates (50 mm × 20 mm × 635 μm) using RF sputtering technique. Copper thin films with various thicknesses (3.3 μm, 3.6 μm and 5.2 μm) were characterized. Low-frequency electrical characterization of these thin films was performed by four-point measurement method and using an HP 4284A type LCRmeter over the frequency range of 20 Hz to 1 MHz. Van der Pauw’s method was used to calculate resistivity. These studies allowed us to know influence of measurement configurations and influence of parameters such as frequency and thickness of the copper thin films on resistivity.
