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Investigation of Induced Distortions in a-Si∶H/a-SiN_x∶H Multilayers by Raman Scattering Technique 被引量:8
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作者 cao guo rong 1, guo shen kang 1, wang zhi chao 2, liu yin chun 2, sun mei xiang 2 (1.dept. of phys., jiangsu university, zhenjiang 212003, chn 2.dept. of phys., Nanjing university, Nanjing 210093, chn) 《Semiconductor Photonics and Technology》 CAS 2002年第4期221-227,共7页
The a Si∶H/SiN x ∶H sample series are investigated by means of Raman scattering technique(RST). The result shows that due to the structural mismatch between a Si∶H and a SiN x ∶H, severe induced distortions are pr... The a Si∶H/SiN x ∶H sample series are investigated by means of Raman scattering technique(RST). The result shows that due to the structural mismatch between a Si∶H and a SiN x ∶H, severe induced distortions are produced in the interface of the heterojunction, and these induced distortions tend towards a certain energy state. The ordering of the interface structure depends on the periodic number of multilayer thin films. 展开更多
关键词 Multilayer films Heterojunction Interface region INDUCED DISTORTIONS
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