CNx films prepared by high dose ion implantation and post-annealing were studied by Auger electron spectroscopy,x-ray photoelectron spectroscopy and x-ray diffraction.A nearly uniform CNx layer was formed.Carbon and n...CNx films prepared by high dose ion implantation and post-annealing were studied by Auger electron spectroscopy,x-ray photoelectron spectroscopy and x-ray diffraction.A nearly uniform CNx layer was formed.Carbon and nitrogen were found covalently bonded in the films.X-ray diffraction results showed that two crystal phases of C_(3)N_(4),β-C_(3)N_(4) and p-C_(3)N_(4),have been formed in the matrix of carbon.展开更多
基金the National Natural Science Foundation of Chinathe State Education Commission of China.
文摘CNx films prepared by high dose ion implantation and post-annealing were studied by Auger electron spectroscopy,x-ray photoelectron spectroscopy and x-ray diffraction.A nearly uniform CNx layer was formed.Carbon and nitrogen were found covalently bonded in the films.X-ray diffraction results showed that two crystal phases of C_(3)N_(4),β-C_(3)N_(4) and p-C_(3)N_(4),have been formed in the matrix of carbon.
