Strontium titanate films with high a-axis-orientation [a(100) =94.1%] were deposited on (111) Pt/Ti/SiO_(2)/Si substrates by the metal organic deposition process.X-ray diffraction shows that the degree of a-axis orien...Strontium titanate films with high a-axis-orientation [a(100) =94.1%] were deposited on (111) Pt/Ti/SiO_(2)/Si substrates by the metal organic deposition process.X-ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature.It is found that the dielectric properties are improved by a higher annealing temperature,while the leakage currents are also enhanced,and the possible causes of temperature dependence are discussed.展开更多
基金Supported by the National Natural Science Foundation of China under Grant No 50972056.
文摘Strontium titanate films with high a-axis-orientation [a(100) =94.1%] were deposited on (111) Pt/Ti/SiO_(2)/Si substrates by the metal organic deposition process.X-ray diffraction shows that the degree of a-axis orientation increases with increasing annealing temperature.It is found that the dielectric properties are improved by a higher annealing temperature,while the leakage currents are also enhanced,and the possible causes of temperature dependence are discussed.
