A novel linear microprobe array(LMPA)has been developed by a conventional microfabrication method from silicon.The LMPA leverages the properties of conventional microwire with additional features of naturally formed r...A novel linear microprobe array(LMPA)has been developed by a conventional microfabrication method from silicon.The LMPA leverages the properties of conventional microwire with additional features of naturally formed regular spacing.With the help of periodic microprobe arrays and double-side V-grooves fabricated in advance between each pair of the two microprobes’rear ends,the number of microprobe units for assembly in one array can be flexibly chosen by cleavage fracture from the LMPA.The fabrication method was demonstrated and the prototype device was assessed by electrochemical impedance spectroscopy(EIS)and in vivo test.The SNR of the spikes recorded was 6.展开更多
基金supported the National Basic Research Program of China("973"Project)(Grant Nos.2011CB933203 and 2011CB933102)the National Hi-Tech Research and Development Program of China("863"Project)(Grant Nos.2012AA030308 and 2013AA032204)+1 种基金the National Natural Science Foundation of China(Grant Nos.61275200,61335010,61178051 and 61178082)the National Important Scientific Apparatus Developing Project(Grant No.2011YQ04008204)
文摘A novel linear microprobe array(LMPA)has been developed by a conventional microfabrication method from silicon.The LMPA leverages the properties of conventional microwire with additional features of naturally formed regular spacing.With the help of periodic microprobe arrays and double-side V-grooves fabricated in advance between each pair of the two microprobes’rear ends,the number of microprobe units for assembly in one array can be flexibly chosen by cleavage fracture from the LMPA.The fabrication method was demonstrated and the prototype device was assessed by electrochemical impedance spectroscopy(EIS)and in vivo test.The SNR of the spikes recorded was 6.
