Non-Dispersive InfraRed(NDIR)gas sensor is widely used for gas detection in collieries and the gas chemical industry,etc.The performance of the NDIR gas sensor depends on the volume,optical length and transmittance of...Non-Dispersive InfraRed(NDIR)gas sensor is widely used for gas detection in collieries and the gas chemical industry,etc.The performance of the NDIR gas sensor depends on the volume,optical length and transmittance of the gas chamber.However,the existing gas sensor products have problems of large volume,high cost and incapable of integration,which need to develop towards the miniaturized sensor.This paper first presents the theoretical background of the NDIR gas sensor and the novel structure of a fully integrated infrared gas sensor and its micro-machined gas chamber structure.Then,the light structure and the gas flow of the gas chamber are optimized on Tracepro software and Ansys workbench,respectively,and the technological process for preparing the Micro-Electro-Mechanical System(MEMS)gas chamber is designed.Finally,we produce a gas chamber with a small volume and good transmissivity,which would be the most important part of producing the miniaturized NDIR gas sensor.展开更多
This paper overviews design for manufacturing （DFM） for IC design in nano-CMOS technologies. Process/device issues relevant to the manufacturability of ICs in advanced CMOS technologies will be presented first befor...This paper overviews design for manufacturing （DFM） for IC design in nano-CMOS technologies. Process/device issues relevant to the manufacturability of ICs in advanced CMOS technologies will be presented first before an exploration on process/device modeling for DFM is done. The discussion also covers a brief introduction of DFM-aware of design flow and EDA efforts to better handle the design-manufacturing interface in very large scale IC design environment.展开更多
基金This work was supported by the National Key Research and Development Program of China(Grant No.2017YFB0406404)the Chongqing Science and Technology Major Theme Project(No.cstc2018jszx-cyztzxX0001).
文摘Non-Dispersive InfraRed(NDIR)gas sensor is widely used for gas detection in collieries and the gas chemical industry,etc.The performance of the NDIR gas sensor depends on the volume,optical length and transmittance of the gas chamber.However,the existing gas sensor products have problems of large volume,high cost and incapable of integration,which need to develop towards the miniaturized sensor.This paper first presents the theoretical background of the NDIR gas sensor and the novel structure of a fully integrated infrared gas sensor and its micro-machined gas chamber structure.Then,the light structure and the gas flow of the gas chamber are optimized on Tracepro software and Ansys workbench,respectively,and the technological process for preparing the Micro-Electro-Mechanical System(MEMS)gas chamber is designed.Finally,we produce a gas chamber with a small volume and good transmissivity,which would be the most important part of producing the miniaturized NDIR gas sensor.
基金the National Natural Science Foundation of China (Grant No. 60736030)
文摘This paper overviews design for manufacturing （DFM） for IC design in nano-CMOS technologies. Process/device issues relevant to the manufacturability of ICs in advanced CMOS technologies will be presented first before an exploration on process/device modeling for DFM is done. The discussion also covers a brief introduction of DFM-aware of design flow and EDA efforts to better handle the design-manufacturing interface in very large scale IC design environment.
