We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser.The results revealed the possibility to efficiently tune ...We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser.The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range.This process is much faster than similar,previously presented methods(in the order of seconds,compared to hours).This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.展开更多
基金Engineering and Physical Sciences Research Council(EP/L00044X/1,EP/L021129/1,EP/M024539/1,EP/N03247/1,EP/R003076/1)European Commission。
文摘We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser.The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range.This process is much faster than similar,previously presented methods(in the order of seconds,compared to hours).This technique can also be applied to accurately trim the optical performance of any other silicon photonic device based on nitrogen-rich silicon nitride.
