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Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection 被引量:1
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作者 Yu Lu Lin Kai +6 位作者 caiyi chen Qing Yang Yizhao Meng Yi Liu Yang cheng Xun Hou Feng chen 《Advanced Photonics Nexus》 2022年第2期45-51,共7页
.Nanochannel structures with a feature size deeply under the diffraction limit and a high aspect ratio hold huge biomedical significance,which is especially challenging to be realized on hard and brittle materials,suc... .Nanochannel structures with a feature size deeply under the diffraction limit and a high aspect ratio hold huge biomedical significance,which is especially challenging to be realized on hard and brittle materials,such as silica,diamond,and sapphire.By simultaneously depositing the pulse energy on the surface and inside the sample,nanochannels with the smallest feature size of 18 nm(∼1∕30λ)and more than 200 aspect ratios are achieved inside silica,the mechanism of which can be concluded as the surface assisting material ejection effect.Both the experimental and theoretical results prove that the coaction of the superficial“hot domain”and internal hot domain dominates the generation of the nanochannels,which gives new insights into the laser-material interacting mechanisms and potentially promotes the corresponding application fields. 展开更多
关键词 femtosecond laser direct writing NANOCHANNELS spatially shaping surface assisting material ejection
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