We propose a new method for the development of multi-beam systems for the spatial alignment and stability of beams based on the error separation technique.This method avoids alignment errors caused by coupling effect ...We propose a new method for the development of multi-beam systems for the spatial alignment and stability of beams based on the error separation technique.This method avoids alignment errors caused by coupling effect of piezoelectric devices,inaccurate correction calculations,and detection mode of the angular deviation.According to the results by external detectors,the error value of spatial alignment and the root mean square[RMS]of deviations under control during 1 h can be equivalent to approximately 0.87 and 1.06 nm at the sample plane under an oil immersion lens[focal length f=2 mm].The RMS of deviations is less than one-third of those currently reported for multi-beam systems;therefore,higher alignment and stability accuracy can be achieved with our proposed method.展开更多
In section 3.2,a reference(Ref.33)was missing in the first sentence.It was already listed in the References list and correctly cited in another portion of the text.Section 3.2,the second sentence incorrectly referred ...In section 3.2,a reference(Ref.33)was missing in the first sentence.It was already listed in the References list and correctly cited in another portion of the text.Section 3.2,the second sentence incorrectly referred to the"pattern in Fig.2";the pattern was specific to Fig.S6 in the Supplemental Material.展开更多
Direct laser writing(DLW)enables arbitrary three-dimensional nanofabrication.However,the diffraction limit poses a major obstacle for realizing nanometer-scale features.Furthermore,it is challenging to improve the fab...Direct laser writing(DLW)enables arbitrary three-dimensional nanofabrication.However,the diffraction limit poses a major obstacle for realizing nanometer-scale features.Furthermore,it is challenging to improve the fabrication efficiency using the currently prevalent single-focal-spot systems,which cannot perform high-throughput lithography.To overcome these challenges,a parallel peripheral-photoinhibition lithography system with a sub-40-nm two-dimensional feature size and a sub-20-nm suspended line width was developed in our study,based on two-photon polymerization DLW.The lithography efficiency of the developed system is twice that of conventional systems for both uniform and complex structures.The proposed system facilitates the realization of portable DLW with a higher resolution and throughput.展开更多
The corrosion resistance and cytocompatibility of Ti-20 Zr-10 Nb-4 Ta(TZNT) alloy modified by surface laser treatment were investigated. The scanning electron microscopy(SEM) measurements indicated that laser trea...The corrosion resistance and cytocompatibility of Ti-20 Zr-10 Nb-4 Ta(TZNT) alloy modified by surface laser treatment were investigated. The scanning electron microscopy(SEM) measurements indicated that laser treatment on TZNT alloy generated groove morphologies with the width of^40 μm and the depth of ~10 μm on the surface. The water contact angles along the groove direction decreased by 51%compared with that of the untreated alloy. The laser treatment promoted the oxidation of metallic Ti, Zr and Nb and produced more stable oxides on surface. The corrosion potential increased by 50% and corrosion current density decreased by72% compared with that of the untreated alloy in the anodic polarization test for the alloy in Hank’s solution at 37°C. This indicated the improvement of the corrosion resistance by laser treatment. The cytotoxicity testing results showed that the laser-treated TZNT alloy performed similar MC3 T3-E1 cell viability compared with the untreated alloy. The cells displayed oriented growth along the groove direction due to the increased hydrophilicity. This novel material may be a new candidate in orthopedics and dentistry implantations fields.展开更多
基金supported by the National Key R&D Program of China(No.2021YFF0502700)National Natural Science Foundation of China(Nos.52105565 and 62105298)+3 种基金Natural Science Foundation of Zhejiang Province(Nos.LQ22F050015 and LQ22F050017)Major Program of Natural Science Foundation of Zhejiang Province(No.LD21F050002)Postdoctoral Research Foundation of China(No.2020M671822)Major Scientific Project of Zhejiang Lab(No.2020MC0AE01)。
文摘We propose a new method for the development of multi-beam systems for the spatial alignment and stability of beams based on the error separation technique.This method avoids alignment errors caused by coupling effect of piezoelectric devices,inaccurate correction calculations,and detection mode of the angular deviation.According to the results by external detectors,the error value of spatial alignment and the root mean square[RMS]of deviations under control during 1 h can be equivalent to approximately 0.87 and 1.06 nm at the sample plane under an oil immersion lens[focal length f=2 mm].The RMS of deviations is less than one-third of those currently reported for multi-beam systems;therefore,higher alignment and stability accuracy can be achieved with our proposed method.
文摘In section 3.2,a reference(Ref.33)was missing in the first sentence.It was already listed in the References list and correctly cited in another portion of the text.Section 3.2,the second sentence incorrectly referred to the"pattern in Fig.2";the pattern was specific to Fig.S6 in the Supplemental Material.
基金the National Key Research and Development Program of China(Grant No.2021YFF0502700)the National Natural Science Foundation of China(Grant Nos.62105298,52105565,and 22105180)+2 种基金China Postdoctoral Science Foundation(Grant Nos.2020M671823 and 2020M681956)the Natural Science Foundation of Zhejiang Province,China(Grant Nos.LD21F050002,LQ22F050017,and LQ22F050015)the Major Scientific Project of Zhejiang Lab,China(Grant No.2020MC0AE01).
文摘Direct laser writing(DLW)enables arbitrary three-dimensional nanofabrication.However,the diffraction limit poses a major obstacle for realizing nanometer-scale features.Furthermore,it is challenging to improve the fabrication efficiency using the currently prevalent single-focal-spot systems,which cannot perform high-throughput lithography.To overcome these challenges,a parallel peripheral-photoinhibition lithography system with a sub-40-nm two-dimensional feature size and a sub-20-nm suspended line width was developed in our study,based on two-photon polymerization DLW.The lithography efficiency of the developed system is twice that of conventional systems for both uniform and complex structures.The proposed system facilitates the realization of portable DLW with a higher resolution and throughput.
基金supported by the National Natural Science Foundation of China (NSFC, 51771011)the Fundamental Research Funds for the Central Universities (KG12002601)
文摘The corrosion resistance and cytocompatibility of Ti-20 Zr-10 Nb-4 Ta(TZNT) alloy modified by surface laser treatment were investigated. The scanning electron microscopy(SEM) measurements indicated that laser treatment on TZNT alloy generated groove morphologies with the width of^40 μm and the depth of ~10 μm on the surface. The water contact angles along the groove direction decreased by 51%compared with that of the untreated alloy. The laser treatment promoted the oxidation of metallic Ti, Zr and Nb and produced more stable oxides on surface. The corrosion potential increased by 50% and corrosion current density decreased by72% compared with that of the untreated alloy in the anodic polarization test for the alloy in Hank’s solution at 37°C. This indicated the improvement of the corrosion resistance by laser treatment. The cytotoxicity testing results showed that the laser-treated TZNT alloy performed similar MC3 T3-E1 cell viability compared with the untreated alloy. The cells displayed oriented growth along the groove direction due to the increased hydrophilicity. This novel material may be a new candidate in orthopedics and dentistry implantations fields.