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Broad-range,high-linearity,and fast-response pressure sensing enabled by nanomechanical resonators based on 2D non-layered material:β-In_(2)S_(3) 被引量:1
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作者 Junzhi Zhu Song Wu +13 位作者 Luming Wang Jiaqi Wu Jiankai Zhu Luwei Zou Fei Xiao Ziluo Su chenyin jiao Shenghai Pei Zejuan Zhang Jiaze Qin Bo Xu Yu Zhou Juan Xia Zenghui Wang 《InfoMat》 SCIE CSCD 2024年第8期119-127,共9页
Two-dimensional(2D)non-layered materials,along with their unique surface properties,offer intriguing prospects for sensing applications.Introducing mechanical degrees of freedom is expected to enrich the sensing perfo... Two-dimensional(2D)non-layered materials,along with their unique surface properties,offer intriguing prospects for sensing applications.Introducing mechanical degrees of freedom is expected to enrich the sensing performances of 2D non-layered devices,such as high frequency,high tunability,and large dynamic range,which could lead to new types of high performance nanosensors.Here,we demonstrate 2D non-layered nanomechanical resonant sensors based onβ-In_(2)S_(3),where the devices exhibit robust nanomechanical vibrations up to the very high frequency(VHF)band.We show that such device can operate as pressure sensor with broad range(from 103 Torr to atmospheric pressure),high linearity(with a nonlinearity factor as low as 0.0071),and fast response(with an intrinsic response time less than 1μs).We further unveil the frequency scaling law in theseβ-In_(2)S_(3) nanomechanical sensors and successfully extract both the Young's modulus and pretension for the crystal.Our work paves the way towards future wafer-scale design and integrated sensors based on 2D non-layered materials. 展开更多
关键词 2D non-layered materials frequency scaling nanomechanical resonators pressure sensing
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Pressure-triggered stacking dependence of interlayer coupling in bilayer WS_(2)
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作者 Zejuan Zhang chenyin jiao +6 位作者 Shenghai Pei Xilong Zhou Jiaze Qin Wanli Zhang Yu Zhou Zenghui Wang Juan Xia 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2024年第8期177-186,共10页
Tungsten disulfide(WS_(2))has been reported to show negligible stacking dependence under ambient conditions,impeding its further explorations on physical properties and potential applications.Here,we realize efficient... Tungsten disulfide(WS_(2))has been reported to show negligible stacking dependence under ambient conditions,impeding its further explorations on physical properties and potential applications.Here,we realize efficient modulation of interlayer coupling in bilayer WS_(2)with 3R and 2H stackings by high pressure,and find that the pressure-triggered interlayer coupling and pressure-induced resonant-to-nonresonant transition exhibit prominent stacking dependence,which are experimentally observed for the first time in WS2.Our work may unleash the stacking degree of freedom in designing WS_(2)devices with tailored properties correlated to interlayer coupling. 展开更多
关键词 tungsten disulfide pressure engineering stacking order interlayer coupling
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基于一种多功能系统的二维纳米器件高效制备 被引量:1
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作者 梁亚春 焦陈寅 +10 位作者 肖飞 朱健凯 徐博 文婷 伍松 任子明 韦学勇 陈滢 贾浩 夏娟 王曾晖 《中国科学:信息科学》 CSCD 北大核心 2022年第2期348-357,共10页
原子级厚度的二维层状晶体材料具有丰富的物理特性,在新型微纳米器件领域展现出重要的发展潜力,相关的器件制备和性能研究也引起了广泛的关注.二维材料微纳米器件的制备需要经过二维材料的转移及金属电极的淀积等一系列过程.然而,在传... 原子级厚度的二维层状晶体材料具有丰富的物理特性,在新型微纳米器件领域展现出重要的发展潜力,相关的器件制备和性能研究也引起了广泛的关注.二维材料微纳米器件的制备需要经过二维材料的转移及金属电极的淀积等一系列过程.然而,在传统的制备流程中所涉及多步工艺需要用到诸多不同设备,如二维材料转移对准系统、电子束曝光系统,或是光刻系统,而且往往在一些步骤中涉及有机溶液处理,有可能会对样品带来一些不利的影响.本文设计展示了一种能够实现二维材料微纳米器件制备的多功能系统,该系统不仅可以实现二维材料的高效转移,而且可以直接进行金属电极的准确淀积,并且整个加工流程不涉及溶液处理,具有操作方便、效率高、样品污染少等优点.基于该多功能系统,我们成功制备出了MoS;场效应晶体管并对器件进行了光学表征和电学性能测试,展现了这一系统在高效制备微纳器件方面的潜力. 展开更多
关键词 二维晶体材料 多功能制备系统 材料干法转移 金属电极淀积 MOS 场效应晶体管
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