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High Resolution Medium Energy ion Scattering Analysis for Investigating UltraShallow Junction of Antimony Implanted in Conventional Silicon |
Talal H. Alzanki
Kandil M. Kandil
chris jeynes
Brian J. Sealy
Mohammad R. Alenezi
AbdullahAlmeshal
Naziha M. Aldukhanand
Adel Ghoneim
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《材料科学与工程(中英文A版)》
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2016 |
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