High-speed and high-resolution imaging of surface profiles is critical for the investigation of various structures and mechanical dynamics of micro-and nano-scale devices.In particular,recent emergence of various nonl...High-speed and high-resolution imaging of surface profiles is critical for the investigation of various structures and mechanical dynamics of micro-and nano-scale devices.In particular,recent emergence of various nonlinear,transient and complex mechanical dynamics,such as anharmonic vibrations in mechanical resonators,has necessitated real-time surface deformation imaging with higher axial and lateral resolutions,speed,and dynamic range.However,real-time capturing of fast and complex mechanical dynamics has been challenging,and direct time-domain imaging of displacements and mechanical motions has been a missing element in studying full-field structural and dynamic behaviours.Here,by exploiting the electro-optic sampling with a frequency comb,we demonstrate a line-scan time-of-flight(TOF)camera that can simultaneously measure the TOF changes of more than 1000 spatial coordinates with hundreds megapixels/s pixel-rate and sub-nanometre axial resolution over several millimetres field-of-view.This unique combination of performances enables fast and precise imaging of both complex structures and dynamics in three-dimensional devices and mechanical resonators.展开更多
基金This research was supported by the National Research Foundation of Korea(Grants 2021R1A2B5B03001407 and 2021R1A5A1032937 for J.K,2021R1A4A1031660 for H.Y,2020R1A2C3004885 for J.L.)。
文摘High-speed and high-resolution imaging of surface profiles is critical for the investigation of various structures and mechanical dynamics of micro-and nano-scale devices.In particular,recent emergence of various nonlinear,transient and complex mechanical dynamics,such as anharmonic vibrations in mechanical resonators,has necessitated real-time surface deformation imaging with higher axial and lateral resolutions,speed,and dynamic range.However,real-time capturing of fast and complex mechanical dynamics has been challenging,and direct time-domain imaging of displacements and mechanical motions has been a missing element in studying full-field structural and dynamic behaviours.Here,by exploiting the electro-optic sampling with a frequency comb,we demonstrate a line-scan time-of-flight(TOF)camera that can simultaneously measure the TOF changes of more than 1000 spatial coordinates with hundreds megapixels/s pixel-rate and sub-nanometre axial resolution over several millimetres field-of-view.This unique combination of performances enables fast and precise imaging of both complex structures and dynamics in three-dimensional devices and mechanical resonators.
