SAW sensors using five different types of polymer to detect of chemical agents(DMMP,CH_3CN,CH_2Cl_2,DCP) have been fabricated and its gas response characteristics were extensively investigated.The polymers used as the...SAW sensors using five different types of polymer to detect of chemical agents(DMMP,CH_3CN,CH_2Cl_2,DCP) have been fabricated and its gas response characteristics were extensively investigated.The polymers used as the sensing material are polyisobutylene(PIB),polyepichlorohydrin(PECH),polydimethylsiloxane(PDMS),polyisoprene(PIP)and polybutadiene(PBD).Their thin films were coated on quartz substrate by spin coating technique.Three types of simulants gases,dimethylmethylphosphonate(DMMP),acetonitrile(CH_3CN)and dichloromethane(CH_2Cl_2),dichloropentane(DCP)were used as target gases,instead of the real nerve,blood,choking and vesicant agents.After spin coating of PIB and PECH,the substrates were heated to 65℃with N_2 flow for 1 h to remove the cyclohexane and ethylacetate which was used as solvent. PDMS was heated to 75℃with N_2 flow for 2 h to remove the ethylacetate which was used as solvent.PBD and PIP on the substrate were heated to 60℃with N_2 flow for 1 h to remove the benzen which was used as solvent.The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.展开更多
文摘SAW sensors using five different types of polymer to detect of chemical agents(DMMP,CH_3CN,CH_2Cl_2,DCP) have been fabricated and its gas response characteristics were extensively investigated.The polymers used as the sensing material are polyisobutylene(PIB),polyepichlorohydrin(PECH),polydimethylsiloxane(PDMS),polyisoprene(PIP)and polybutadiene(PBD).Their thin films were coated on quartz substrate by spin coating technique.Three types of simulants gases,dimethylmethylphosphonate(DMMP),acetonitrile(CH_3CN)and dichloromethane(CH_2Cl_2),dichloropentane(DCP)were used as target gases,instead of the real nerve,blood,choking and vesicant agents.After spin coating of PIB and PECH,the substrates were heated to 65℃with N_2 flow for 1 h to remove the cyclohexane and ethylacetate which was used as solvent. PDMS was heated to 75℃with N_2 flow for 2 h to remove the ethylacetate which was used as solvent.PBD and PIP on the substrate were heated to 60℃with N_2 flow for 1 h to remove the benzen which was used as solvent.The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.
