MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the Mo...MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the MoST? coatings are characteristic of dense coherent structures, with high adhesion (critical scratch load above 120 N), high load bearing capacity up to 5 GPa., low friction (0.02-0.1), high wear resistance (less than 4xlO"17 m3/N m) even at a relative humidity of 40%, and high temperature resistance up to 350 °C. The successful applications of MoST? coatings in large- scale productions for dry cutting and forming, with increasing lifetime and productivity are presented.展开更多
The technique of ion plating was introduced by Mattox[1] in 1963. All PVD techniques used for the deposition of hard wear resistant coatings for tribological applications rely on the ion bombardment of the coating... The technique of ion plating was introduced by Mattox[1] in 1963. All PVD techniques used for the deposition of hard wear resistant coatings for tribological applications rely on the ion bombardment of the coating during deposition in order to obtain the required coating properties and are all variations of the original ion plating technique. To obtain a dense, hard, wear resistant coating the ion current density during deposition needs to be high, more than 1 mA/cm2 and the energy of the ions should be not more than about 50 eV.……展开更多
文摘MoSi/Ti composite coatings (MoST?), have been deposited by a closed-field unbalanced magnetron sputter ion-plating system. The high ion-current densities at low substrate bias voltage of the system ensures that the MoST? coatings are characteristic of dense coherent structures, with high adhesion (critical scratch load above 120 N), high load bearing capacity up to 5 GPa., low friction (0.02-0.1), high wear resistance (less than 4xlO"17 m3/N m) even at a relative humidity of 40%, and high temperature resistance up to 350 °C. The successful applications of MoST? coatings in large- scale productions for dry cutting and forming, with increasing lifetime and productivity are presented.
文摘 The technique of ion plating was introduced by Mattox[1] in 1963. All PVD techniques used for the deposition of hard wear resistant coatings for tribological applications rely on the ion bombardment of the coating during deposition in order to obtain the required coating properties and are all variations of the original ion plating technique. To obtain a dense, hard, wear resistant coating the ion current density during deposition needs to be high, more than 1 mA/cm2 and the energy of the ions should be not more than about 50 eV.……
