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Study of TiC+TiN Multiple Films On Type of 316L Stainless Steel 被引量:10
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作者 XUEQi JINYong +2 位作者 HUDong-ping HUANGBen-sheng dengbai-quan 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期916-920,共5页
In this paper, the synthesis process of TiC+TiN multiple films on super-low-carbon stainless steels is reported. The TiC layer is coated as the first layer in the multiple film, the change of growth rate of the film o... In this paper, the synthesis process of TiC+TiN multiple films on super-low-carbon stainless steels is reported. The TiC layer is coated as the first layer in the multiple film, the change of growth rate of the film on the 316L Stainless steel is not same as the one on carbides substrates, while the mole ratio of CRi to TiCLi (mCH/TiCl4) is changed from 1.2 to 2.0. The Ti [C, N], as a kind of inter-layer between TiC and TiN layers, is helpful to improve the adhesion between the TiC and TiN layer. The cooling rate greatly influences the quality of the adhesion between the TiC+TiN film and substrates. 展开更多
关键词 316L不锈钢 CVD TIC TIN 复合薄膜
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