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Practical Approach Design Piezoresistive Pressure Sensor in Circular Diaphragm
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作者 Renan Gabbi Luiz Antonio Rasia +3 位作者 daniel curvello de mendonca müller Jorge Ramírez Beltrán Jose Antonio Gonzalez da Silva manuel martin Perez Reimbold 《材料科学与工程(中英文B版)》 2019年第3期85-91,共7页
This paper presents a methodology for analytical calculation and computational simulation using the finite element method for piezoresistive graphite sensor element on flexible polymer substrate,A4 paper.The computer ... This paper presents a methodology for analytical calculation and computational simulation using the finite element method for piezoresistive graphite sensor element on flexible polymer substrate,A4 paper.The computer simulation aims to find the region of greatest mechanical tension and deflection of the circular diaphragm set in the circumference edges.The steps for simulation are geometry definition,mesh generation,inclusion of material physical properties and simulation execution.The mathematical modeling of maximum mechanical stress and deflection is described analytically and computationally.The analytical calculations were compared with the computer simulation and presented a relative percentage error of 3.38%for the maximum deflection.The results show that the piezoresistor should be positioned at the edges of the circular diaphragm to take advantage of maximum mechanical stress by defining the best location for graphite film deposition for sensor device designs and fabrications. 展开更多
关键词 PIEZORESISTIVITY sensor element finite elements and mathematical modeling
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