The high flexibility,impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors.However,for capacitive pressure sensors,the sensitivity offered b...The high flexibility,impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors.However,for capacitive pressure sensors,the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors.Here,we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small,freestanding double-layer graphene membranes.We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene,even after high-temperature annealing.These sensors are readout using a low-cost battery-powered circuit board,with a responsivity of up to 47:8aF Pa^(−1) mm^(−2),thereby outperforming the commercial sensors.展开更多
基金M.S.,M.L.,H.S.J.v.d.Z.,and P.G.S.acknowledge funding from the European Union’s Horizon 2020 research and innovation program under grant agreement numbers 785219 and 881603.
文摘The high flexibility,impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors.However,for capacitive pressure sensors,the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors.Here,we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small,freestanding double-layer graphene membranes.We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene,even after high-temperature annealing.These sensors are readout using a low-cost battery-powered circuit board,with a responsivity of up to 47:8aF Pa^(−1) mm^(−2),thereby outperforming the commercial sensors.
