Methane （CH4） plasma was used to produce amorphous hydrogenated carbon （a- C：H） films by a single capacitively coupled radio frequency （RF） powered plasma system. The system consists of two parallel electrodes...Methane （CH4） plasma was used to produce amorphous hydrogenated carbon （a- C：H） films by a single capacitively coupled radio frequency （RF） powered plasma system. The system consists of two parallel electrodes： the upper electrode is connected to 13.56 MHz RF power and the lower one is connected to the ground. Thin films were deposited on glass slides with different sizes and on silicon wafers. The influence of the plasma species on film characteristics was studied by changing the plasma parameters. The changes of plasma species during the deposition were investigated by optical emission spectroscopy （OES）. The structural and optical properties were analyzed via Fourier transform infrared （FTIR） spectroscopy, X-ray diffraction （XRD） and UV-visible spectroscopy, and the thicknesses of the samples were measured by a profilometer. The sp3/sp2 ratio and the existing H atoms play a significant role in the determination of the chemical properties of thin films in the plasma. The film quality and deposition rate were both increased by raising the power and the flow rate.展开更多
Nonlinear behavior of glow discharge plasmas is experimentally investigated.The glow is generated between a barrier semiconductor electrode,Chromium doped namely Gallium Arsenide（Ga As：Cr）,as a cathode and an Indiu...Nonlinear behavior of glow discharge plasmas is experimentally investigated.The glow is generated between a barrier semiconductor electrode,Chromium doped namely Gallium Arsenide（Ga As：Cr）,as a cathode and an Indium–Tin Oxide（ITO） coated glass electrode as an anode,in reverse bias.The planar nature of electrodes provides symmetry in spatial geometry.The discharge behaves oscillatory in the time domain,with single and sometimes multiperiodicities in plasma current and voltage characteristics.In this paper,harmonic frequency generation and transition to chaotic behavior is investigated.The observed current–voltage characteristics of the discharge are discussed in detail.展开更多
基金supported by the Scientific Research Project Fund of Duzce University under the projectnumber 2013.05.02.195
文摘Methane （CH4） plasma was used to produce amorphous hydrogenated carbon （a- C：H） films by a single capacitively coupled radio frequency （RF） powered plasma system. The system consists of two parallel electrodes： the upper electrode is connected to 13.56 MHz RF power and the lower one is connected to the ground. Thin films were deposited on glass slides with different sizes and on silicon wafers. The influence of the plasma species on film characteristics was studied by changing the plasma parameters. The changes of plasma species during the deposition were investigated by optical emission spectroscopy （OES）. The structural and optical properties were analyzed via Fourier transform infrared （FTIR） spectroscopy, X-ray diffraction （XRD） and UV-visible spectroscopy, and the thicknesses of the samples were measured by a profilometer. The sp3/sp2 ratio and the existing H atoms play a significant role in the determination of the chemical properties of thin films in the plasma. The film quality and deposition rate were both increased by raising the power and the flow rate.
基金supported by the Scientific Research Project Fund of Middle East Technical University,under project # BAP-08-11-2016-044
文摘Nonlinear behavior of glow discharge plasmas is experimentally investigated.The glow is generated between a barrier semiconductor electrode,Chromium doped namely Gallium Arsenide（Ga As：Cr）,as a cathode and an Indium–Tin Oxide（ITO） coated glass electrode as an anode,in reverse bias.The planar nature of electrodes provides symmetry in spatial geometry.The discharge behaves oscillatory in the time domain,with single and sometimes multiperiodicities in plasma current and voltage characteristics.In this paper,harmonic frequency generation and transition to chaotic behavior is investigated.The observed current–voltage characteristics of the discharge are discussed in detail.
