Atomic force microscopy(AFM)is a widely adopted imaging and surface analysis technique that provides resolutions on the nanometer scale.AFM tip-based nanomachining has recently been adopted for the fabrication of arbi...Atomic force microscopy(AFM)is a widely adopted imaging and surface analysis technique that provides resolutions on the nanometer scale.AFM tip-based nanomachining has recently been adopted for the fabrication of arbitrarily shaped nanoscale structures.A major challenge of using AFM tip-based machining for the sculpting of nanoscale plasmonic structures is the build-up of displaced material along the sides of the channels.Here we apply this nanomechanical machining method to create active plasmonic elements and present the strategy we have been using to avoid the formation of such debris.Furthermore,a number of post-manufacturing treatments that can potentially be used to reduce the amount of debris surrounding the fabricated structures are discussed.展开更多
基金Funding was provided by Science Foundation Ireland(Grant No.SFI 18/FIP/3551R).
文摘Atomic force microscopy(AFM)is a widely adopted imaging and surface analysis technique that provides resolutions on the nanometer scale.AFM tip-based nanomachining has recently been adopted for the fabrication of arbitrarily shaped nanoscale structures.A major challenge of using AFM tip-based machining for the sculpting of nanoscale plasmonic structures is the build-up of displaced material along the sides of the channels.Here we apply this nanomechanical machining method to create active plasmonic elements and present the strategy we have been using to avoid the formation of such debris.Furthermore,a number of post-manufacturing treatments that can potentially be used to reduce the amount of debris surrounding the fabricated structures are discussed.
