A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed,with the plasma-confining magnetic field produced exclusively by permanent magnets...A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed,with the plasma-confining magnetic field produced exclusively by permanent magnets.Microwave power of up to 175W in the frequency range from 12.75 to 14.SGHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner.The waveguide coupling system serves also as biased electrode,and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas- mixing mode.A triode extraction system sustains ion acceleration voltages between 1kV and 10kV.The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.展开更多
基金Supported by the Vienna University of Technology
文摘A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed,with the plasma-confining magnetic field produced exclusively by permanent magnets.Microwave power of up to 175W in the frequency range from 12.75 to 14.SGHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner.The waveguide coupling system serves also as biased electrode,and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas- mixing mode.A triode extraction system sustains ion acceleration voltages between 1kV and 10kV.The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.
